Journal ArticleDOI
Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
R. Pedrak,Tzv. Ivanov,K. Ivanova,Teodor Gotszalk,N. Abedinov,Ivo W. Rangelow,Klaus Edinger,E. Tomerov,Thomas Schenkel,P. Hudek +9 more
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In this paper, the authors describe microprobes for noncontact scanning force microscopy that make use of a directoscillating thermally driven bimorph actuator with integrated piezoresistive readout sensor.Abstract:
This article describes microprobes for noncontact scanning force microscopy that make use of a direct-oscillating thermally driven bimorph actuator with integrated piezoresistive readout sensor The sensitivity has been increased using direct current for biasing and alternating current for exciting the thermally driven cantilever in a higher flexural mode The cantilever operates in the phase-shift atomic force microscopy (AFM) detection technique The main advantage of phase imaging is the higher z resolution at high scan rates and much lower forces than in height imaging with contact AFM Critical dimensions measurements illustrating the imaging capability and resolution of our new scanning proximal probe are demonstratedread more
Citations
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A Survey of Control Issues in Nanopositioning
TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
Components for high speed atomic force microscopy
Georg E. Fantner,Georg Schitter,Johannes H. Kindt,Tzvetan Ivanov,Katarina Ivanova,Rohan Patel,Niels Holten-Andersen,Jonathan D. Adams,Philipp J. Thurner,Ivo W. Rangelow,Paul K. Hansma +10 more
TL;DR: A new scanner principle is developed, based on stack piezos, which allows the construction of a scanner with 15 microm scan range while retaining high resonance frequencies (>10 kHz) and to drive the AFM at high scan speeds and record the height and error signal.
Journal ArticleDOI
Aspects of scanning force microscope probes and their effects on dimensional measurement
Andrew Yacoot,Ludger Koenders +1 more
TL;DR: In this article, the authors describe the various scanning probe microscopy tips and cantilevers used today for scanning force microscopy and magnetic force imaging, together with an overview of the various tip-sample interactions that affect dimensional measurements.
Journal ArticleDOI
SiC cantilever resonators with electrothermal actuation
Liudi Jiang,Rebecca Cheung,John Hedley,Musaab Hassan,Alun Harris,Jim Burdess,Mehran Mehregany,Christian A. Zorman +7 more
TL;DR: In this article, the 3C-SiC cantilever resonators designed for electrothermal actuation are presented and an analytical model has been developed to understand the electrical power distribution in the cantilevers for the different material systems as well as the different metal terminations.
Journal ArticleDOI
Review of Electrothermal Actuators and Applications
Alissa Potekhina,Changhai Wang +1 more
TL;DR: A review of electrothermal micro-actuators and applications is presented in this paper, where the three main configurations of electro-thermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph.
References
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Journal ArticleDOI
Analysis of Bi-Metal Thermostats
TL;DR: In this article, a general theory of bending of a bi-metal strip submitted to a uniform heating is presented, which is applied in analysis of the operation of a Bi-metal Strip thermostat.
Journal ArticleDOI
Fractured polymer/silica fiber surface studied by tapping mode atomic force microscopy
TL;DR: In this article, a silica optical fiber was imaged using an atomic force microscope (AFM) in both contact and tapping mode, and it was shown that tapping mode AFM can reduce the contact force significantly, estimated to be as low as a tenth of a nanonewton.
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Quality factors in micron- and submicron-thick cantilevers
TL;DR: In this article, measurements of the mechanical quality factor Q for arrays of silicon-nitride, polysilicon, and single-crystal silicon cantilevers have been obtained by studying the dependence of Q on cantilever material, geometry, and surface treatments.
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Atomic resolution with an atomic force microscope using piezoresistive detection
TL;DR: In this article, a new detection scheme for atomic force microscopy (AFM) was proposed to yield atomic resolution images of conducting and nonconducting layered materials using a piezoresistive strain sensor embedded in the AFM cantilever.
Journal ArticleDOI
Thermally excited silicon microactuators
W. Riethmuller,Wolfgang Benecke +1 more
TL;DR: In this paper, a cantilever-type micromachined silicon actuator based on the bimetal effect used extensively for the fabrication of temperature-controlled electrical switches is described.