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Ersoy Subaşı

Researcher at Ruhr University Bochum

Publications -  4
Citations -  95

Ersoy Subaşı is an academic researcher from Ruhr University Bochum. The author has contributed to research in topics: Thin film & Atomic layer deposition. The author has an hindex of 4, co-authored 4 publications receiving 52 citations.

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Water assisted atomic layer deposition of yttrium oxide using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) yttrium(III): process development, film characterization and functional properties

TL;DR: In this article, a new atomic layer deposition (ALD) process for yttrium oxide (Y2O3) thin films using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) [Y(DPDMG)3] which possesses an optimal reactivity towards water that enabled the growth of high quality thin films.
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PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases.

TL;DR: For the first time, NAP-XPS surface studies on selected HfO2 layers are reported upon exposure to reactive H2, O2, and H2O atmospheres at temperatures of up to 500 °C revealing remarkable stability against degradation.
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Femtosecond laser patterning of graphene electrodes for thin-film transistors

TL;DR: In this article, the femtosecond laser patterning of graphene in air and in vacuum for the application as source and drain electrodes in thin-film transistors (TFTs) was evaluated.