E
Ersoy Subaşı
Researcher at Ruhr University Bochum
Publications - 4
Citations - 95
Ersoy Subaşı is an academic researcher from Ruhr University Bochum. The author has contributed to research in topics: Thin film & Atomic layer deposition. The author has an hindex of 4, co-authored 4 publications receiving 52 citations.
Papers
More filters
Journal ArticleDOI
Water assisted atomic layer deposition of yttrium oxide using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) yttrium(III): process development, film characterization and functional properties
Lukas Mai,Nils Boysen,Ersoy Subaşı,Teresa de los Arcos,Detlef Rogalla,Guido Grundmeier,Claudia Bock,Hong-Liang Lu,Anjana Devi +8 more
TL;DR: In this article, a new atomic layer deposition (ALD) process for yttrium oxide (Y2O3) thin films using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) [Y(DPDMG)3] which possesses an optimal reactivity towards water that enabled the growth of high quality thin films.
Journal ArticleDOI
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO2-Based Thin-Film Transistor Devices.
Lukas Mai,David Zanders,Ersoy Subaşı,Engin Ciftyurek,Christian Hoppe,Detlef Rogalla,Wolfram Gilbert,Teresa de los Arcos,Klaus Schierbaum,Guido Grundmeier,Claudia Bock,Anjana Devi +11 more
TL;DR: A bottom-up process from precursor development for tin to plasma-enhanced atomic layer deposition (PEALD) for tin(IV) oxide and its successful implementation in a working thin-film transistor device is reported.
Journal ArticleDOI
PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases.
David Zanders,Engin Ciftyurek,Ersoy Subaşı,Niklas Huster,Claudia Bock,Aleksander Kostka,Detlef Rogalla,Klaus Schierbaum,Anjana Devi +8 more
TL;DR: For the first time, NAP-XPS surface studies on selected HfO2 layers are reported upon exposure to reactive H2, O2, and H2O atmospheres at temperatures of up to 500 °C revealing remarkable stability against degradation.
Journal ArticleDOI
Femtosecond laser patterning of graphene electrodes for thin-film transistors
Maren Kasischke,Ersoy Subaşı,Claudia Bock,Duy-Vu Pham,Evgeny L. Gurevich,Ulrich Kunze,Andreas Ostendorf +6 more
TL;DR: In this article, the femtosecond laser patterning of graphene in air and in vacuum for the application as source and drain electrodes in thin-film transistors (TFTs) was evaluated.