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Eugene A. Fitzgerald

Researcher at Massachusetts Institute of Technology

Publications -  118
Citations -  4386

Eugene A. Fitzgerald is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Dislocation & Silicon. The author has an hindex of 37, co-authored 118 publications receiving 4258 citations. Previous affiliations of Eugene A. Fitzgerald include Singapore–MIT alliance & National University of Singapore.

Papers
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Water purification and enhancement systems

TL;DR: Water purification system comprising filtration media sized with respect to each other to allow a first contaminant in the water to saturate the first medium with a delay prior to saturation of the second medium with another contaminant.
Journal ArticleDOI

Silicon-Based Epitaxial Films for Mems

TL;DR: In this article, an improved wet etch-stop technology for silicon micromachining was developed based on the germanium-based epitaxial etch stop technology for improving process control.
Proceedings ArticleDOI

Dislocation engineering in strained mos materials

TL;DR: In this paper, global and local methods to control threading dislocation densities are presented. But the authors also show that dislocation nucleation and propagation can be used to create larger values of strain, higher than the level expected in equilibrium.