E
Eugene A. Fitzgerald
Researcher at Massachusetts Institute of Technology
Publications - 118
Citations - 4386
Eugene A. Fitzgerald is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Dislocation & Silicon. The author has an hindex of 37, co-authored 118 publications receiving 4258 citations. Previous affiliations of Eugene A. Fitzgerald include Singapore–MIT alliance & National University of Singapore.
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Water purification and enhancement systems
TL;DR: Water purification system comprising filtration media sized with respect to each other to allow a first contaminant in the water to saturate the first medium with a delay prior to saturation of the second medium with another contaminant.
Journal ArticleDOI
Deep level traps in semi-polar n-GaN grown on patterned sapphire substrate by metalorganic vapor phase epitaxy
Xuan Sang Nguyen,H. W. Hou,P. de Mierry,Philippe Vennéguès,Florian Tendille,Aaron R. Arehart,Steven A. Ringel,Eugene A. Fitzgerald,Eugene A. Fitzgerald,Soo Jin Chua,Soo Jin Chua +10 more
TL;DR: In this paper, semi-polar GaN (11-22) was characterized using deep level transient spectroscopy (DLTS) and deep level optical spectroscopic (DLOS) techniques.
Journal ArticleDOI
Silicon-Based Epitaxial Films for Mems
TL;DR: In this article, an improved wet etch-stop technology for silicon micromachining was developed based on the germanium-based epitaxial etch stop technology for improving process control.
Journal ArticleDOI
Erratum: “Strain relaxation due to V-pit formation in InxGa1−xN∕GaN epilayers grown on sapphire” [J. Appl. Phys. 98, 084906 (2005)]
Proceedings ArticleDOI
Dislocation engineering in strained mos materials
Eugene A. Fitzgerald,Minjoo Lawrence Lee,B. Yu,K.L. Lee,Carl L. Dohrman,David M. Isaacson,Thomas A. Langdo,Dimitri A. Antoniadis +7 more
TL;DR: In this paper, global and local methods to control threading dislocation densities are presented. But the authors also show that dislocation nucleation and propagation can be used to create larger values of strain, higher than the level expected in equilibrium.