E
Eugene A. Fitzgerald
Researcher at Massachusetts Institute of Technology
Publications - 118
Citations - 4386
Eugene A. Fitzgerald is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Dislocation & Silicon. The author has an hindex of 37, co-authored 118 publications receiving 4258 citations. Previous affiliations of Eugene A. Fitzgerald include Singapore–MIT alliance & National University of Singapore.
Papers
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Synthesis of Germanium Nanocrystals and its Possible Application in Memory Devices
L.W. Teo,C. L. Heng,Vincent Ho,Tay,Wee Kiong Choi,Wai Kin Chim,Dimitri A. Antoniadis,Eugene A. Fitzgerald +7 more
TL;DR: In this paper, a tri-layer structure comprising of a thin (~5nm) SiO2 layer grown using rapid thermal oxidation (RTO), followed by a layer of Ge+SiO2 of varying thickness (6 20 nm) deposited using the radio frequency (r.f.) co-sputtering technique and a SiO 2 cap layer (50nm) was used r.f. sputtering, was investigated.
Journal ArticleDOI
Strained SiGe Materials for High Quantum Efficiency Photodiodes at µ = 1.3 to 1.5µm
TL;DR: In this article, a strain-balanced superlattice has been designed and grown on a high quality Ge0.75Si0.25 relaxed buffer using UHV-CVD.
III-V/Si Device Integration Via Metamorphic SiGe Substrates
Abstract: This paper presents growth, characterization and device results for III-V optoelectronic and solar cell heterostructure devices that have been monolithically integrated on Si via ultra low dislocation density SiGe interlayers. Prior work that has demonstrated high performance single junction solar cells (Andre et al., 2005) and visible wavelength LEDs (Kwon et al., 2005) on Si is extended here to include visible wavelength laser diodes and dual junction solar cells on Si in which AlGaInP materials are used as active layers on Si
Proceedings ArticleDOI
Reducing Threading Dislocation Densities in SiGe Mismatched Layers by Controllingc Strainc rate and Surface Roughness
TL;DR: In this paper, the effects of surface roughness, dislocation velocities, and dislocation nucleation have been de-coupled, and they have produced relaxed layers with low threading dislocation density that are 4 times less thick than their control graded composition layers.
Patent
Finfet device and method to make same
TL;DR: In this article, a method for the fabrication of a prestructured SOI substrate is presented, where fin-shaped strips evenly distributed over the entire surface of the substrate are evenly distributed.