Manufacturing processes that can create extremely small machines have been developed in recent years. Microelectromechanical systems (MEMS) refer to devices that have characteristic length of less than 1 mm but more than 1 micron, that combine electrical and mechanical components and that are fabricated using integrated circuit batch-processing techniques. Electrostatic, magnetic, pneumatic and thermal actuators, motors, valves, gears, and tweezers of less than 100-μm size have been fabricated. These have been used as sensors for pressure, temperature, mass flow, velocity and sound, as actuators for linear and angular motion and as simple components for complex systems such as micro-heat-engines and micro-heat-pumps The technology is progressing at a rate that fa r exceeds that of our understanding of the unconventional physics involved in the operation as well as the manufacturing of those minute devices. The primary objective of this article is to critically review the status of our understanding of fluid flow phenomena particular to microdevices. In terms of applications, the paper emphasizes the use of MEMS as sensors and actuators for flow diagnosis and control.

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The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture

Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

This review gives a brief overview of microvalves, and focuses on the actuation mechanisms and their applications. One of the stumbling blocks for successful miniaturization and commercialization of fully integrated microfluidic systems was the development of reliable microvalves. Applications of the microvalves include flow regulation, on/off switching and sealing of liquids, gases or vacuums. Microvalves have been developed in the form of active or passive microvalves employing mechanical, non-mechanical and external systems. Even though great progress has been made during the last 20 years, there is plenty of room for further improving the performance of existing microvalves.

http://iopscience.iop.org/article/10.1088/0960-1317/16/5/R01/pdf

A review of microvalves

The push toward the miniaturization of electro-mechanical devices and the resulting need for micro-power generation (milli-watts to watts) with low-weight, long-life devices has led to the recent development of the field of micro-scale combustion. The concept behind this new field is that since batteries have low specific energy, and liquid hydrocarbon fuels have a very high specific energy, a miniaturized power generating device, even with a relatively inefficient conversion of hydrocarbon fuels to power would result in increased lifetime and/or reduced weight of an electronic or mechanical system that currently requires batteries for power. In addition to the interest in miniaturization, the field is also driven by the potential fabrication of the devices using Micro Electro Mechanical Systems (MEMS) or rapid prototyping techniques, with their favorable characteristics for mass production and low cost. The micro-power generation field is very young, and still is in most cases in the feasibility stage. However, considering that it is a new frontier of technological development, and that only a few projects have been funded, it can be said that significant progress has been made to date. Currently there is consensus, at least among those working in the field, that combustion in the micro-scale is possible with proper thermal and chemical management. Several meso-scale and micro-scale combustors have been developed that appear to operate with good combustion efficiency. Some of these combustors have been applied to energize thermoelectric systems to produce electrical power, although with low overall efficiency. Several turbines/engines have also been, or are being, developed, some of them currently producing positive power, also with low efficiency to date. Micro-rockets using solid or liquid fuels have been built and shown to produce thrust. Hydrogen-based micro size fuel cells have been successfully developed, and there is a need to develop reliable reformers (or direct-conversion fuel cells) for liquid hydrocarbons so that the fuel cells become competitive with batteries. In this work, some of the technological issues related to meso and micro-scale combustion and the operation of thermochemical devices for power generation will be discussed. Some of the systems currently being developed will be presented and described.

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Micropower generation using combustion: Issues and approaches

Microscale combustion: Technology development and fundamental research

This is a report on work in progress on microelectrical and mechanical systems (MEMS)-based gas turbine engines, turbogenerators, and rocket engines currently under development at MIT. Fabricated in large numbers in parallel using semiconductor manufacturing techniques, these engines are based on micro-high speed rotating machinery with the same power density as that achieved in their more familiar, full-sized brethren. The micro-gas turbine is a 1 cm diameter by 3 mm thick SiC heat engine designed to produce 10-20 W of electric power or 0.050.1 Nt of thrust while consuming under 10 grams/hr of H 2 . Later versions may produce up to 100 W using hydrocarbon fuels. A liquid fuel, bi-propellant rocket motor of similar size could develop over 3 lb of thrust. The rocket motor would be complete with turbopumps and control valves on the same chip. These devices may enable new concepts in propulsion, fluid control, and por table power generation.

Micro-heat engines, gas turbines, and rocket engines -the mit microengine project-

MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H/sub 2/. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

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G. Anathasuresh

Papers

Micro-heat engines, gas turbines, and rocket engines -the mit microengine project-

Power MEMS and microengines