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Chuan Seng Tan
Researcher at Nanyang Technological University
Publications - 416
Citations - 5567
Chuan Seng Tan is an academic researcher from Nanyang Technological University. The author has contributed to research in topics: Wafer & Silicon. The author has an hindex of 35, co-authored 367 publications receiving 4554 citations. Previous affiliations of Chuan Seng Tan include Rafael Advanced Defense Systems & University of Montpellier.
Papers
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Proceedings ArticleDOI
Micro-heat engines, gas turbines, and rocket engines -the mit microengine project-
Alan H. Epstein,Stephen D. Senturia,O. Al-Midani,G. Anathasuresh,Arturo A. Ayon,Kenneth S. Breuer,Kuo-Shen Chen,F. F. Ehrich,E. M. Esteve,Luc G. Fréchette,G. Gauba,Reza Ghodssi,C. Groshenry,Stuart A. Jacobson,Jack L. Kerrebrock,Jeffrey H. Lang,C. C. Lin,A. P. London,J. Lopata,A. Mehra,J. O.Mur Miranda,Steven F. Nagle,D. J. Orr,E. S. Piekos,Martin A. Schmidt,G. Shirley,S.M. Spearing,Chuan Seng Tan,Y. S. Tzeng,L. A. Waitz +29 more
TL;DR: The work in progress on microelectrical and mechanical systems (MEMS)-based gas turbine engines, turbogenerators, and rocket engines currently under development at MIT is described in this paper.
Proceedings ArticleDOI
Technology, performance, and computer-aided design of three-dimensional integrated circuits
TL;DR: The overall 3D integration process flow is discussed, as well as specific technological challenges and the issues they present to circuit designers and how these issues may be tackled during the placement, routing, and layout stages of physical design.
Journal ArticleDOI
Morphology and Bond Strength of Copper Wafer Bonding
TL;DR: The morphology and bond strength of copper-bonded wafer pairs prepared under different bonding/annealing temperatures and durations are presented in this article, where the interfacial morphology was examined by transmission electron microscopy while the bond strength was examined from a diesaw test.
Proceedings ArticleDOI
Power MEMS and microengines
Alan H. Epstein,Stephen D. Senturia,G. Anathasuresh,Arturo A. Ayon,Kenneth S. Breuer,Kuo-Shen Chen,F. F. Ehrich,G. Gauba,Reza Ghodssi,C. Groshenry,Stuart A. Jacobson,Jeffrey H. Lang,C.-C. Mehra,J. O.Mur Miranda,Steven F. Nagle,D. J. Orr,E. S. Piekos,Martin A. Schmidt,G. Shirley,S.M. Spearing,Chuan Seng Tan,Y. S. Tzeng,Ian A. Waitz +22 more
TL;DR: In this article, the first power MEMS-based gas turbine generator is presented, which can produce 10-20 W of electric power while consuming 10 grams/hr of H/sub 2.