K
Kuo-Shen Chen
Researcher at National Cheng Kung University
Publications - 164
Citations - 2610
Kuo-Shen Chen is an academic researcher from National Cheng Kung University. The author has contributed to research in topics: Residual stress & Mobile robot. The author has an hindex of 26, co-authored 152 publications receiving 2438 citations. Previous affiliations of Kuo-Shen Chen include Massachusetts Institute of Technology.
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Journal ArticleDOI
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
TL;DR: In this article, a set of experiments was designed and performed to fully characterize the sensitivity of surface morphology and mechanical behavior of silicon samples produced with different DRIE operating conditions, and the data was then fitted to response surfaces to model the dependence of response variables on dry processing conditions.
Proceedings ArticleDOI
Micro-heat engines, gas turbines, and rocket engines -the mit microengine project-
Alan H. Epstein,Stephen D. Senturia,O. Al-Midani,G. Anathasuresh,Arturo A. Ayon,Kenneth S. Breuer,Kuo-Shen Chen,F. F. Ehrich,E. M. Esteve,Luc G. Fréchette,G. Gauba,Reza Ghodssi,C. Groshenry,Stuart A. Jacobson,Jack L. Kerrebrock,Jeffrey H. Lang,C. C. Lin,A. P. London,J. Lopata,A. Mehra,J. O.Mur Miranda,Steven F. Nagle,D. J. Orr,E. S. Piekos,Martin A. Schmidt,G. Shirley,S.M. Spearing,Chuan Seng Tan,Y. S. Tzeng,L. A. Waitz +29 more
TL;DR: The work in progress on microelectrical and mechanical systems (MEMS)-based gas turbine engines, turbogenerators, and rocket engines currently under development at MIT is described in this paper.
Power MEMS and Microengines
Alan H. Epstein,Stephen D. Senturia,G. K. Ananthasuresh,Arturo A. Ayon,Kenneth S. Breuer,Kuo-Shen Chen,F. F. Ehrich,Gautam Gauba,Reza Ghodssi,C. Groshenry,Stuart A. Jacobson,Jeffrey H. Lang,C. C. Lin,A. Mehra,Jose Oscar Mur-Miranda,Steve Nagle,D. J. Orr,Ed Piekos,Martin A. Schmidt,Gregory Shirley,Mark S. Spearing,Choon S. Tan,Sheng-Yang Tzeng,Ian A. Waitz +23 more
Abstract: MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H/sub 2/. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.
Proceedings ArticleDOI
Power MEMS and microengines
Alan H. Epstein,Stephen D. Senturia,G. Anathasuresh,Arturo A. Ayon,Kenneth S. Breuer,Kuo-Shen Chen,F. F. Ehrich,G. Gauba,Reza Ghodssi,C. Groshenry,Stuart A. Jacobson,Jeffrey H. Lang,C.-C. Mehra,J. O.Mur Miranda,Steven F. Nagle,D. J. Orr,E. S. Piekos,Martin A. Schmidt,G. Shirley,S.M. Spearing,Chuan Seng Tan,Y. S. Tzeng,Ian A. Waitz +22 more
TL;DR: In this article, the first power MEMS-based gas turbine generator is presented, which can produce 10-20 W of electric power while consuming 10 grams/hr of H/sub 2.
Journal ArticleDOI
Controlling and Testing the Fracture Strength of Silicon on the Mesoscale
TL;DR: In this article, the Weibull reference strength of planar biaxial flexure specimens was found to lie in the range 1.2 to 4.6 GPa.