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G. U. Singco

Researcher at IBM

Publications -  1
Citations -  740

G. U. Singco is an academic researcher from IBM. The author has contributed to research in topics: Electronic circuit & Integrated circuit. The author has an hindex of 1, co-authored 1 publications receiving 711 citations.

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Three-dimensional integrated circuits

TL;DR: The process steps and design aspects that were developed at IBM to enable the formation of stacked device layers are reviewed, including the descriptions of a glass substrate process to enable through-wafer alignment and a single-damascene patterning and metallization method for the creation of high-aspect-ratio capability.