K
K. W. Guarini
Researcher at IBM
Publications - 1
Citations - 740
K. W. Guarini is an academic researcher from IBM. The author has contributed to research in topics: Electronic circuit & Integrated circuit. The author has an hindex of 1, co-authored 1 publications receiving 711 citations.
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Three-dimensional integrated circuits
Anna W. Topol,D.C. La Tulipe,L. Shi,David J. Frank,K. Bernstein,Steven E. Steen,Arvind Kumar,G. U. Singco,A. M. Young,K. W. Guarini,Meikei Ieong +10 more
TL;DR: The process steps and design aspects that were developed at IBM to enable the formation of stacked device layers are reviewed, including the descriptions of a glass substrate process to enable through-wafer alignment and a single-damascene patterning and metallization method for the creation of high-aspect-ratio capability.