G
Guizhen Yan
Researcher at Peking University
Publications - 128
Citations - 1325
Guizhen Yan is an academic researcher from Peking University. The author has contributed to research in topics: Gyroscope & Vibrating structure gyroscope. The author has an hindex of 20, co-authored 126 publications receiving 1241 citations. Previous affiliations of Guizhen Yan include Hong Kong University of Science and Technology.
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An improved TMAH Si-etching solution without attacking exposed aluminum
TL;DR: In this paper, an improved Tetramethyl Ammonium hydroxide (TMAH) etching method is reported, which features higher silicon etching rate and results in smooth silicon surface and at the same time no significant aluminum etching is observed.
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Sensitive, selective and stable tin dioxide thin-films for carbon monoxide and hydrogen sensing in integrated gas sensor array applications
TL;DR: In this paper, the preparation, electrical and surface characterization of Cu doped tin dioxide thin-films for highly selective integrated gas sensor devices was reported, and a highly selective sensor device for CO and H 2 gas was fabricated.
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A monolithic integrated 4 × 4 tin oxide gas sensor array with on-chip multiplexing and differential readout circuits
TL;DR: In this article, a monolithic 4 × 4 tin oxide gas sensor array together with on-chip multiplexing and differential read-out circuitry is presented, which uses a surface micro-machined micro-hotplate based structure.
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Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes
TL;DR: In this article, the authors present a detailed study on the transient response and stability of the automatic gain control (AGC) with a proportion-integral (PI) controller for a MEMS vibratory gyroscope, which constructs a closed-loop control system to achieve a constant amplitude vibration at its resonant frequency.
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An Integrated Surface Micromachined Convex Microhotplate Structure for Tin Oxide Gas Sensor Array
TL;DR: In this paper, a convex microhotplate (MHP) structure using surface micromachining technology was developed to increase the thermal efficiency, which is critical for large dimension and low power gas sensor array integration.