Part I. Silicon Photonics - Introduction: 1. Fabless Silicon Photonics: 1.1 Introduction 1.2 Silicon photonics - the next fabless semiconductor industry 1.3 Applications 1.4 Technical challenges and the state of the art 1.5 Opportunities 2. Modelling and Design Approaches: 2.1 Optical Waveguide Mode Solver 2.2 Wave Propagation 2.3 Optoelectronic models 2.4 Microwave Modelling 2.5 Thermal Modelling 2.6 Photonic Circuit Modelling 2.7 Physical Layout 2.8 Software Tools Integration Part II. Silicon Photonics - Passive Components: 3. Optical Materials and Waveguides: 3.1 Silicon-on-Insulator 3.2 Waveguides 3.3 Bent waveguides 3.4 Code Listings 3.5 Problems 4. Fundamental Building Blocks: 4.1 Directional couplers 4.2 Y-Branch 4.3 Mach-Zehnder Interferometer 4.4 Ring resonators 4.5 Waveguide Bragg Grating Filters 4.6 Code Listings 4.7 Problems 5. Optical I/O: 5.1 The challenge of optical coupling to silicon photonic chips 5.2 Grating Coupler 5.3 Edge Coupler 5.4 Polarization 5.5 Code Listings 5.6 Problems Part III. Silicon Photonics - Active Components: 6. Modulators: 6.1 Plasma Dispersion E 6.2 PN Junction Phase Shifter 6.3 Micro-ring Modulators 6.4 Forward-biased PIN Junction 6.5 Active Tuning 6.6 Thermo-Optic Switch 6.7 Code Listings 6.8 Problems 7. Detectors: 7.1 Performance Parameters 7.2 Fabrication 7.3 Types of detectors 7.4 Design Considerations 7.5 Detector modelling 7.5.2 Electronic Simulations 7.6 Code Listings 7.7 Problems 8. Lasers: 8.1 External Lasers 8.2 Laser Modelling 8.3 Co-Packaging 8.4 Hybrid Silicon Lasers 8.5 Monolithic Lasers 8.6 Alternative Light Sources 8.7 Problems Part IV. Silicon Photonics - System Design: 9. Photonic Circuit Modelling: 9.1 Need for photonic circuit modelling 9.2 Components for System Design 9.3 Compact Models 9.4 Directional Coupler - Compact Model 9.5 Ring Modulator - Circuit Model 9.6 Grating Coupler - S Parameters 9.7 Code Listings 10. Tools and Techniques: 10.1 Process Design Kit (PDK) 10.2 Mask Layout 11. Fabrication: 11.1 Fabrication Non-Uniformity 11.2 Problems 12. Testing and Packaging: 12.1 Electrical and Optical Interfacing 12.2 Automated Optical Probe Stations 12.3 Design for Test 13. Silicon Photonic System Example: 13.1 Wavelength Division Multiplexed Transmitter.

Silicon Photonics Design: From Devices to Systems

The field of microfluidics has yet to develop practical devices that provide real clinical value. One of the main reasons for this is the difficulty in realizing low-cost, sensitive, reproducible, and portable analyte detection microfluidic systems. Previous research has addressed two main approaches for the detection technologies in lab-on-a-chip devices: (a) study of the compatibility of conventional instrumentation with microfluidic structures, and (b) integration of innovative sensors contained within the microfluidic system. Despite the recent advances in electrochemical and mechanical based sensors, their drawbacks pose important challenges to their application in disposable microfluidic devices. Instead, optical detection remains an attractive solution for lab-on-a-chip devices, because of the ubiquity of the optical methods in the laboratory. Besides, robust and cost-effective devices for use in the field can be realized by integrating proper optical detection technologies on chips. This review examines the recent developments in detection technologies applied to microfluidic biosensors, especially addressing several optical methods, including fluorescence, chemiluminescence, absorbance and surface plasmon resonance.

https://www.mdpi.com/1424-8220/14/8/15458/pdf

Recent developments in optical detection technologies in Lab-on-a-Chip devices for biosensing applications

Thanks to advanced semiconductor microfabrication technology, chip-scale integration and miniaturization of lab-on-a-chip components, silicon-based optical biosensors have made significant progress for the purpose of point-of-care diagnosis In this review, we provide an overview of the state-of-the-art in evanescent field biosensing technologies including interferometer, microcavity, photonic crystal, and Bragg grating waveguide-based sensors Their sensing mechanisms and sensor performances, as well as real biomarkers for label-free detection, are exhibited and compared We also review the development of chip-level integration for lab-on-a-chip photonic sensing platforms, which consist of the optical sensing device, flow delivery system, optical input and readout equipment At last, some advanced system-level complementary metal-oxide semiconductor (CMOS) chip packaging examples are presented, indicating the commercialization potential for the low cost, high yield, portable biosensing platform leveraging CMOS processes

Silicon Photonic Biosensors Using Label-Free Detection.

Recent advances in lab-on-a-chip for biosensing applications

Abstract Photonic applications based on planar waveguide technology impose stringent requirements on properties such as optical propagation losses, light coupling to optical fibers, integration density, as well as on reliability and reproducibility. The latter is correlated to a high level of control of the refractive index and waveguide geometry. In this paper, we review a versatile dielectric waveguide platform, called TriPleX, which is based on alternating silicon nitride and silicon dioxide films. Fabrication with CMOS-compatible equipment based on low-pressure chemical vapor deposition enables the realization of stable material compositions being a prerequisite to the control of waveguide properties and modal shape. The transparency window of both materials allows for the realization of low-loss waveguides over a wide wavelength range (400 nm–2.35 μm). Propagation losses as low as 5×10-4 dB/cm are reported. Three basic geometries (box shell, double stripe, and filled box) can be distinguished. A specific tapering technology is developed for on-chip, low-loss (<0.1 dB) spotsize convertors, allowing for combining efficient fiber to chip coupling with high-contrast waveguides required for increased functional complexity as well as for hybrid integration with other photonic platforms such as InP and SOI. The functionality of the TriPleX platform is captured by verified basic building blocks. The corresponding library and associated design kit is available for multi-project wafer (MPW) runs. Several applications of this platform technology in communications, biomedicine, sensing, as well as a few special fields of photonics are treated in more detail.

TriPleX: a versatile dielectric photonic platform

A complete photonic wire molecular biosensor microarray chip architecture and supporting instrumentation is described. Chip layouts with 16 and 128 independent sensors have been fabricated and tested, where each sensor can provide an independent molecular binding curve. Each sensor is 50 μm in diameter, and consists of a millimeter long silicon photonic wire waveguide folded into a spiral ring resonator. An array of 128 sensors occupies a 2 × 2 mm2 area on a 6 × 9 mm2 chip. Microfluidic sample delivery channels are fabricated monolithically on the chip. The size and layout of the sensor array is fully compatible with commercial spotting tools designed to independently functionalize fluorescence based biochips. The sensor chips are interrogated using an instrument that delivers sample fluid to the chip and is capable of acquiring up to 128 optical sensor outputs simultaneously and in real time. Coupling light from the sensor chip is accomplished through arrays of sub-wavelength surface grating couplers, and the signals are collected by a fixed two-dimensional detector array. The chip and instrument are designed so that connection of the fluid delivery system and optical alignment are automated, and can be completed in a few seconds with no active user input. This microarray system is used to demonstrate a multiplexed assay for serotyping E. coli bacteria using serospecific polyclonal antibody probe molecules.

Photonic wire biosensor microarray chip and instrumentation with application to serotyping of Escherichia coli isolates

A complete instrumentation system for interrogating silicon photonic wire waveguide sensor array chips has been built and demonstrated. The system is designed to read 16 or more photonic wire sensors on a single silicon chip simultaneously and in real time, while delivering sample fluid to the sensors through microfluidic channels fabricated monolithically on the chip. The chip can be inserted into the instrument, automatically aligned with input optics and fluid connection, and be ready for measurement in a few minutes.

A fully integrated silicon photonic wire sensor array chip and reader instrument

Photonic wire evanescent field (PWEF) sensor chips have been developed for multiplexed label free molecular detection. The sensors are made using 260 nm × 450 nm cross-section silicon waveguides folded into spirals less than 200 μm in diameter, but with an overall sensor length of more than a millimeter. The long propagation length gives a response to molecular binding much better than currently available tools for label-free molecular sensing. These sensors can be arrayed at densities up to ten or more per square millimeter. This talk reviews our ongoing work on the photonic wire sensor chip design and layout, on-chip integrated fluidics, optical coupling, and chip interrogation using arrays of grating couplers formed using sub-wavelength patterned structures. The goal is to develop a commercially viable sensor platform by addressing cost-of-instrumentation, cost per measurement, ease-of-use, and by increasing the number of sensors that can be simultaneously monitored.

H. McIntosh

Papers

Photonic wire biosensor microarray chip and instrumentation with application to serotyping of Escherichia coli isolates

A fully integrated silicon photonic wire sensor array chip and reader instrument

Silicon photonic wire biosensors: Sensing, instrumentation, and applications