H
Helmut Seidel
Researcher at Saarland University
Publications - 122
Citations - 4098
Helmut Seidel is an academic researcher from Saarland University. The author has contributed to research in topics: Thin film & Silicon. The author has an hindex of 25, co-authored 119 publications receiving 3923 citations. Previous affiliations of Helmut Seidel include TMEIC Corporation & Daimler AG.
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Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers
TL;DR: In this article, the anisotropic etching behavior of single-crystal silicon and the behavior of and in an ethylenediamine-based solution as well as in aqueous,, and were studied.
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Anisotropic Etching of Crystalline Silicon in Alkaline Solutions II . Influence of Dopants
TL;DR: In this article, the etching behavior of highly boron doped silicon in aqueous solutions based of ethylenediamine, KOH, NaOH, and LiOH was studied.
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The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
TL;DR: In this paper, the influence of different sputtering conditions on the microstructure of AlN thin films with a typical thickness of about 500mm was investigated, and it was demonstrated that highly c-axis oriented Aln thin films can be deposited on nominally unheated (1 −0 −0) silicon substrates, most preferentially when using a pure nitrogen atmosphere.
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Resonant accelerometer with self-test
TL;DR: In this paper, a doubly clamped beam coupled to a seismic mass is presented, where the beam is thermally excited by an implanted resistor and its vibration is sensed piezoresistively.
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Capacitive silicon accelerometer with highly symmetrical design
TL;DR: In this paper, the design and performance of a capacitive micromechanical accelerometer, as well as an electronic circuit for the conditioning of the output signal are described, which consists of a differential capacitance which is formed by a seismic silicon mass and two counter electrodes situated on anodically bonded glass plates.