Hye Jin Jo

TL;DR: In this paper, the authors present a gap controller for determining widths of the first and second gaps in a semiconductor manufacturing reaction chamber, where a top plate has a gas port for introducing the reactant gas into the reaction chamber; a face plate, having through holes, disposed opposite the process region; a first baffle plate, with through holes between the top plate and the face plate and capable of moving up or down, wherein the second baffle has a top surface that defines a second gap for forming a second lateral flow passage; and a gap controllers for determining the

TL;DR: In this paper, the authors extended the development of polyimides with intrinsic microporosity by introducing Troger's base (TB) into the polymer backbone via polymerization between imide-containing diamines and dimethoxymethane (DMM).

TL;DR: Novel spirobisindane-containing thermally rearranged (TR) benzoxazole(spiroTR-PBO) membranes showed strong potential to be applied in carbon capture and separation of gases because of their high gas permeability coupled with robust mechanical properties.

TL;DR: In this paper, a thermally rearranged polybenzoxazole-co-imide (TR-PBOI) membrane with improved mechanical strength and good gas separation performance was proposed.

TL;DR: In this article, the incorporation of small amounts of 3,5-diaminobenzoic acid (DABA) comonomer into an ortho-hydroxypolyimide (HPI) precursor constitutes a new methodology to easily improve the gas transport performance of thermally rearranged (TR) polymer membranes.