J
Jae-Sang Ro
Researcher at Massachusetts Institute of Technology
Publications - 20
Citations - 411
Jae-Sang Ro is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Focused ion beam & Ion implantation. The author has an hindex of 6, co-authored 20 publications receiving 394 citations.
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Focused ion beam induced deposition of platinum
TL;DR: In this article, focused ion beam induced deposition of platinum from a precursor gas of (methylcyclopentadienyl)trimethyl platinum has been demonstrated, and the resistivity and composition of the film and the deposition yield have been measured as a function of ion current density, line dose, substrate temperature, geometry, and supplemental hydrogen pressure.
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Focused ion beam fabrication of submicron gold structures
TL;DR: In this article, focused ion beams are used to repair photolithography masks and are of increasing technological interest in the repair of x-ray lithography mask and in integrated circuit restructuring.
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Focused ion beam induced deposition of low‐resistivity gold films
TL;DR: In this paper, focused ion beam induced deposition of metals has up to now produced films with resistivities 30-5000 times higher than bulk values for metals because of high concentrations of impurities from the precursor gas incorporated into the films.
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Mechanism of ion beam induced deposition of gold
TL;DR: In this article, a model based on trim calculations was developed to confirm the view that collision cascades which can provide energy to surface atoms over a substantial area are responsible for ion beam induced deposition.
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Microstructure of Gold Films Grown by Ion Induced Deposition
TL;DR: In this paper, a beam of ions incident on a substrate can cause adsorbed gas molecules to break up, resulting in material deposition, and the relationship between growth conditions, micro-structure and resistivity is discussed.