J
Jian Yang
Researcher at Chinese Academy of Sciences
Publications - 14
Citations - 151
Jian Yang is an academic researcher from Chinese Academy of Sciences. The author has contributed to research in topics: Etching (microfabrication) & Microelectromechanical systems. The author has an hindex of 7, co-authored 14 publications receiving 116 citations.
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Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications
TL;DR: A novel and effective approach was presented to eliminate the influences of substrate clamping and non-ideal electric field distribution and extract the actual value d33 of AlN thin films.
Research on the Piezoelectric Properties of AlN Thin Films for
TL;DR: In this article, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the PFM measurement and finite element method (FEM) simulation.
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Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators
TL;DR: This etching process can meet the manufacturing requirements of aluminum nitride MEMS resonator and the bottom surface roughness of 1.98 nm and the sidewall angle of 83° were achieved.
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A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer
TL;DR: In this article, a novel aluminum nitride (AlN) resonant micro-electromechanical systems (MEMS) accelerometer is reported, where the spring beams are T-shaped with two masses hanged at the end.
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Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via.
TL;DR: The proposed packaging scheme was successfully applied to a capacitive gyroscope and the packaging failure was less than 1%, which demonstrated the feasibility and reliability of the technique for high-performance MEMS vacuum packaging.