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Xiaodong Wang
Researcher at Chinese Academy of Sciences
Publications - 21
Citations - 398
Xiaodong Wang is an academic researcher from Chinese Academy of Sciences. The author has contributed to research in topics: Etching (microfabrication) & Gyroscope. The author has an hindex of 7, co-authored 21 publications receiving 167 citations.
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Journal ArticleDOI
Recent Progress of Miniature MEMS Pressure Sensors.
Peishuai Song,Zhe Ma,Jing Ma,Liangliang Yang,Jiangtao Wei,Yongmei Zhao,Mingliang Zhang,Fuhua Yang,Xiaodong Wang +8 more
TL;DR: The working principles of several types of pressure sensors are briefly introduced, and the sizes, performances, manufacturing processes, structures, and materials of small pressure sensors used in the different fields are explained in detail, especially in the medical field.
Journal ArticleDOI
Review of experimental approaches for improving zT of thermoelectric materials
Zhe Ma,Jiangtao Wei,Peishuai Song,Mingliang Zhang,Liangliang Yang,Jing Ma,Wen Liu,Fuhua Yang,Xiaodong Wang +8 more
TL;DR: In this article, several approaches were reviewed, including increasing Seebeck coefficient, electrical conductivity, power factor, and decreasing thermal conductivity to improve thermoelectric performances, and the current challenges hindering the further improvement of zT value were pointed out.
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The Fabrication of Micro/Nano Structures by Laser Machining.
Liangliang Yang,Jiangtao Wei,Zhe Ma,Peishuai Song,Jing Ma,Yongqiang Zhao,Zhen Huang,Mingliang Zhang,Fuhua Yang,Xiaodong Wang +9 more
TL;DR: Laser machining has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability as mentioned in this paper.
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A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology.
TL;DR: A miniature piezoresistive pressure sensor fabricated by temporary bonding technology and obtained a higher sensitivity of 36 μV/(V∙kPa) in the range of 0–180 kPa was obtained.
Journal ArticleDOI
A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer
TL;DR: In this article, a novel aluminum nitride (AlN) resonant micro-electromechanical systems (MEMS) accelerometer is reported, where the spring beams are T-shaped with two masses hanged at the end.