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Joanna Schmit

Researcher at Veeco

Publications -  75
Citations -  2104

Joanna Schmit is an academic researcher from Veeco. The author has contributed to research in topics: Interferometry & White light interferometry. The author has an hindex of 22, co-authored 75 publications receiving 2029 citations. Previous affiliations of Joanna Schmit include University of Arizona.

Papers
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Journal ArticleDOI

Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry.

TL;DR: The new 5-frame algorithm and two new 6-frame algorithms have smaller phase errors caused by phase-shifter miscalibration than any of the common 3-, 4- or 5- frame algorithms.
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Improved vertical-scanning interferometry

TL;DR: A method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution ofphase-sh shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase- Shifting Interferometry is described.
Journal ArticleDOI

Window function influence on phase error in phase-shifting algorithms.

TL;DR: This work presents five different eight-point phase-shifting algorithms, each with a different window function, and demonstrates that the shape of the window function significantly influences phase error.
Patent

Scanning interferometry with reference signal

TL;DR: In this article, a reference signal is used to track the actual behavior of the scanner (60) in an interferometer (40) to produce scanner-position data that can be used to correct errors introduced by scanner nonlinearities and other error sources.
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High-precision shape measurement by white-light interferometry with real-time scanner error correction

TL;DR: This work presents a technique for measuring OPD changes from the collected interference fringes during each measurement that corrects not only the scanner errors but also slowly varying vibrations.