J
John S. Villarrubia
Researcher at National Institute of Standards and Technology
Publications - 95
Citations - 3379
John S. Villarrubia is an academic researcher from National Institute of Standards and Technology. The author has contributed to research in topics: Metrology & Dimensional metrology. The author has an hindex of 26, co-authored 92 publications receiving 3227 citations. Previous affiliations of John S. Villarrubia include IBM.
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Journal ArticleDOI
A Study of the Surface Texture of Polycrystalline Phosphor Films Using Atomic Force Microscopy
R. Revay,J. Schneir,D. Brower,John S. Villarrubia,Joseph Fu,James P. Cline,T. J. Hsieh,Winnie Wong-Ng +7 more
TL;DR: In this paper, the surface texture of phosphor thin films is determined by using atomic force microscopy (AFM) to measure surface texture and the grain size of the films.
Proceedings ArticleDOI
Line Edge Roughness and Cross Sectional Characterization of Sub‐50 nm Structures Using Critical Dimension Small Angle X‐ray Scattering
Chengqing Wang,Ronald L. Jones,Eric K. Lin,Wen-Li Wu,Derek Ho,John S. Villarrubia,Kwang-Woo Choi,James S. Clarke,Jeanette M. Roberts,Robert L. Bristol,Benjamin Bunday +10 more
TL;DR: In this paper, a series of photoresist line/space patterns featuring programmed line width roughness are measured by critical dimension small angle x-ray scattering (CD•SAXS) for samples with designed periodic roughness.
Journal ArticleDOI
Probing Electrified Liquid-Solid Interfaces with Scanning Electron Microscopy.
Hongxuan Guo,Hongxuan Guo,Hongxuan Guo,Alexander Yulaev,Alexander Yulaev,Evgheni Strelcov,Evgheni Strelcov,Alexander Tselev,Christopher Arble,András E. Vladár,John S. Villarrubia,Andrei Kolmakov +11 more
TL;DR: In this paper, the secondary electron yield of the graphene-liquid interface depends on the ionic strength and concentration of the electrolyte and the applied bias at the remote counter electrode, and demonstrate the feasibility of using scanning electron microscopy to examine and map electrified liquid-solid interfaces.
Journal Article
A Simulation Study of Repeatability and Bias in the CD-SEM | NIST
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Probing Electrified Liquid-Solid Interfaces with Scanning Electron Microscopy
Hongxuan Guo,Hongxuan Guo,Hongxuan Guo,Alexander Yulaev,Alexander Yulaev,Evgheni Strelcov,Evgheni Strelcov,Alexander Tselev,Christopher Arble,András E. Vladár,John S. Villarrubia,Andrei Kolmakov +11 more
TL;DR: It is shown that the secondary electron yield of the graphene-liquid interface depends on the ionic strength and concentration of the electrolyte and the applied bias at the remote counter electrode, and the feasibility of using scanning electron microscopy to examine and map electrified liquid-solid interfaces.