M
Mario Kupnik
Researcher at Technische Universität Darmstadt
Publications - 202
Citations - 3251
Mario Kupnik is an academic researcher from Technische Universität Darmstadt. The author has contributed to research in topics: Capacitive micromachined ultrasonic transducers & Ultrasonic sensor. The author has an hindex of 31, co-authored 177 publications receiving 2728 citations. Previous affiliations of Mario Kupnik include AVL & Vienna University of Technology.
Papers
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Proceedings ArticleDOI
Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell
TL;DR: In this paper, the mass-spring-damper model used for many MEMS structures accurately captures the behavior of a CMUT with a circular plate and provided equations for the CMUT's equivalent massspringdamper parameters, pull-in point, and equivalent circuit parameters.
Journal ArticleDOI
50 kHz capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays
Ira O. Wygant,Mario Kupnik,J.C. Windsor,Wayne M. Wright,Mark S. Wochner,Goksen G. Yaralioglu,Mark F. Hamilton,Butrus T. Khuri-Yakub +7 more
TL;DR: The results presented in this paper demonstrate that large-area CMUTs, which produce high-intensity ultrasound, can be fabricated for transmitting directional sound with parametric arrays.
Journal ArticleDOI
Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding
TL;DR: In this paper, the authors presented the successful fabrication of capacitive micromachined ultrasonic transducers (CMUTs) with an improved insulation layer structure, which is based on consecutive thermal oxidation steps, on local oxidation of silicon (LOCOS), and on direct wafer bonding.
Journal ArticleDOI
Experimental characterization of collapse-mode CMUT operation
Omer Oralkan,B. Bayram,Goksen G. Yaralioglu,Arif Sanli Ergun,Mario Kupnik,David T. Yeh,Ira O. Wygant,Butrus T. Khuri-Yakub +7 more
TL;DR: Compared frequency response and efficiency of the transducer in conventional and collapse regimes, experimental results show that a collapsed membrane can be used to generate and detect ultrasound more efficiently than a membrane operated in the conventional mode.
Journal ArticleDOI
Capacitive Micromachined Ultrasonic Transducers for Therapeutic Ultrasound Applications
TL;DR: The first designs and prototypes of an eight-element, concentric-ring, CMUT array to treat upper abdominal cancers are presented and designed to focus 30-50 mm into tissue, and ablate a 2- to 3-cm-diameter tumor within 1 h.