[신간의 별자리x] 우리/미술, 그리고 ‘슬픔의 박물관’

基礎講座 電気泳動(Electrophoresis)

Intermolecular And Surface Forces

Ion acceleration driven by superintense laser pulses is attracting an impressive and steadily increasing effort. Motivations can be found in the applicative potential and in the perspective to investigate novel regimes as available laser intensities will be increasing. Experiments have demonstrated, over a wide range of laser and target parameters, the generation of multi-MeV proton and ion beams with unique properties such as ultrashort duration, high brilliance, and low emittance. An overview is given of the state of the art of ion acceleration by laser pulses as well as an outlook on its future development and perspectives. The main features observed in the experiments, the observed scaling with laser and plasma parameters, and the main models used both to interpret experimental data and to suggest new research directions are described.

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Ion acceleration by superintense laser-plasma interaction

Polymers have assumed the leading role as substrate materials for microfluidic devices in recent years. They offer a broad range of material parameters as well as material and surface chemical properties which enable microscopic design features that cannot be realised by any other class of materials. A similar range of fabrication technologies exist to generate microfluidic devices from these materials. This review will introduce the currently relevant microfabrication technologies such as replication methods like hot embossing, injection molding, microthermoforming and casting as well as photodefining methods like lithography and laser ablation for microfluidic systems and discuss academic and industrial considerations for their use. A section on back-end processing completes the overview.

Polymer microfabrication technologies for microfluidic systems

MEMS Mechanical Sensors

We present a microfabricated optical cavity, which combines a very small mode volume with high finesse. In contrast to other micro-resonators, such as microspheres, the structure we have built gives atoms and molecules direct access to the high-intensity part of the field mode, enabling them to interact strongly with photons in the cavity for the purposes of detection and quantum-coherent manipulation. Light couples directly in and out of the resonator through an optical fiber, avoiding the need for sensitive coupling optics. This renders the cavity particularly attractive as a component of a lab-on-a-chip, and as a node in a quantum network.

/pdf/microfabricated-high-finesse-optical-cavity-with-open-access-2yob1ox0es.pdf

Microfabricated high-finesse optical cavity with open access and small volume

In this paper, we review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS resonant sensors. Conventionally MEMS resonant sensors use only a single resonator as the sensing element, and the output of the sensor is typically a frequency shift caused by the external stimulus altering the mechanical properties, i.e. the mass or stiffness, of the resonator. Recently, transduction techniques utilizing additional coupled resonators have emerged. The mode-localized resonant sensor is one example of such a technique. If the mode localization effect is utilized, the vibrational amplitude pattern of the resonators changes as a function of the quantity to be measured. Compared to using frequency shift as an output signal, the sensitivity can be improved by several orders of magnitude. Another feature of the mode-localized sensors is the common mode rejection abilities due to the differential structure. These advantages have opened doors for new sensors with unprecedented sensitivity.

A review on coupled MEMS resonators for sensing applications utilizing mode localization

This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitude ratio shift. The proposed mode localization with the differential perturbation method leads to a sensitivity enhancement of a factor of 2 than the common single perturbation method. The theoretical model of the sensitivity, bandwidth, and linearity of the accelerometer is established and verified. The measured relative shift in amplitude ratio ( $\sim 312162$ ppm/g) is 302 times higher than the shift in resonance frequency ( $\sim 1035$ ppm/g) within the measurement range of ±1 g. The measured resolution based on the amplitude ratio is 0.619 mg and the nonlinearity is $\sim 3.5$ % in the open-loop measurement operation. [2015-0247]

An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators

A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.

Michael Kraft

Papers

MEMS Mechanical Sensors

Microfabricated high-finesse optical cavity with open access and small volume

A review on coupled MEMS resonators for sensing applications utilizing mode localization

An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators

A monolithic surface micromachined Z-axis gyroscope with digital output