M
Ming-Hsien Wu
Researcher at Harvard University
Publications - 8
Citations - 646
Ming-Hsien Wu is an academic researcher from Harvard University. The author has contributed to research in topics: Microlens & Photolithography. The author has an hindex of 8, co-authored 8 publications receiving 629 citations.
Papers
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Journal ArticleDOI
Topographical Micropatterning of Poly(dimethylsiloxane) Using Laminar Flows of Liquids in Capillaries
Shuichi Takayama,Emanuele Ostuni,Xiangping Qian,J.C. McDonald,Xingyu Jiang,Philip R. LeDuc,Ming-Hsien Wu,Donald E. Ingber,George M. Whitesides +8 more
TL;DR: The author's notes are based on work published in Thesis, University of Potsdam, Germany 2001, by D.M. Grell, D. Glärner, and R. Scott, R. C.
Patent
Microlens for projection lithography and method of preparation thereof
TL;DR: In this paper, microlens arrays are used to manipulate incident energy or radiation having a distribution in characteristic property(s) defining an object pattern to form a corresponding image pattern on a substrate surface.
Journal ArticleDOI
Fabrication of arrays of two-dimensional micropatterns using microspheres as lenses for projection photolithography
TL;DR: In this article, an array of polystyrene microspheres is used to generate repetitive patterns in photoresist, and the resulting patterns are transferred into metal films by liftoff.
Journal ArticleDOI
Fabrication of two-dimensional arrays of microlenses and their applications in photolithography
TL;DR: In this article, a microlens array is used to pattern the intensity of light incident on photoresist, and the shapes of these micro-structures depend on the shapes and profiles of the microlenses.
Journal ArticleDOI
Patterning flood illumination with microlens arrays
TL;DR: Several types of optical element containing arrays of microlenses were fabricated and used to demonstrate that this technique can generate uniform micropatterns over large areas (>4 cm2) in a single exposure.