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Naoki Makita

Publications -  21
Citations -  876

Naoki Makita is an academic researcher. The author has contributed to research in topics: Substrate (electronics) & Crystalline silicon. The author has an hindex of 12, co-authored 21 publications receiving 876 citations.

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Patent

Semiconductor device method for producing the same and liquid crystal display including the same

TL;DR: In this article, a liquid crystal display device including a display section including a liquid-crystal layer, pixel electrodes located in a matrix on one of the pair of substrates, a plurality of first thin film transistors respectively connected to the plurality of pixel electrodes, and a peripheral driving circuit located for driving the display section, the peripheral drive circuit being located on the substrate on which the first thin-film transistors are located and having a second thin film transistor.
Patent

Method for fabricating a semiconductor device using a catalyst introduction region

TL;DR: In this article, a high-quality crystalline silicon film, having the crystal growth direction aligned in one direction and having no grain boundaries, is obtained using the newly introduced catalyst elements efficiently diffuse only inside the island-patterned amorphous silicon films.
Patent

Method for producing crystalline semiconductor film having reduced concentration of catalyst elements for crystallization and semiconductor device having the same

TL;DR: In this article, a method for producing a semiconductor film is described, which includes the steps of: (a) forming an amorphous semiconductor on a substrate having a surface with an insulating property; (b) introducing a material for accelerating crystallization of the amorphus semiconductor material into at least a part of the material; and (c) crystallizing the material by heating to obtain a crystalline semiconductor oxide film from the material, and (d) oxidizing a surface of the crystalline material to form a semiconducting oxide film containing
Patent

Method for fabricating thin film transistors

TL;DR: In this paper, the introduction of the catalyst elements is conducted by various methods such as: a formation of a film containing a minute amount of the catalysts, application of a solution containing the catalyst element in several spin coating cycles, diffusion of a catalyst element through a buffer layer, dipping into a solution in which the catalyts are dissolved or dispersed, or formation of plating layer containing the catalyters, resulting in polycrystallization of a portion of the amorphous semiconductor film.
Patent

Method for fabricating a semiconductor device

TL;DR: In this article, a method for fabricating a semiconductor device including an active region obtained by utilizing a silicon semiconductor film having crystallinity which is formed on an insulating substrate is disclosed.