P
P. Hapke
Researcher at Forschungszentrum Jülich
Publications - 29
Citations - 1505
P. Hapke is an academic researcher from Forschungszentrum Jülich. The author has contributed to research in topics: Silicon & Plasma-enhanced chemical vapor deposition. The author has an hindex of 13, co-authored 29 publications receiving 1479 citations.
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Journal ArticleDOI
Intrinsic microcrystalline silicon: A new material for photovoltaics
O. Vetterl,Friedhelm Finger,R. Carius,P. Hapke,Lothar Houben,Oliver Kluth,Andreas Lambertz,A. Mück,Bernd Rech,Heribert Wagner +9 more
TL;DR: In this paper, microcrystalline silicon (μc-Si:H) prepared by plasma-enhanced chemical vapor deposition (PECVD) has been investigated as material for absorber layers in solar cells.
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Structural properties of microcrystalline silicon in the transition from highly crystalline to amorphous growth
TL;DR: In this paper, the structural properties of a series of films grown under a variation of the dilution of the process gas silane in hydrogen, which induces a transition from highly crystalline to amorphous growth, were investigated.
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Improvement of grain size and deposition rate of microcrystalline silicon by use of very high frequency glow discharge
TL;DR: In this paper, the influence of the plasma excitation frequency on the growth conditions and material properties of microcrystalline silicon prepared by plasma enhanced chemical vapor deposition at low deposition temperature is investigated.
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Structure and growth of hydrogenated microcrystalline silicon : investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies
TL;DR: In this paper, the structural properties of microcrystalline silicon were investigated by transmission electron microscopy and by Raman spectroscopy and a columnar structure parallel to the growth direction was observed for all conditions investigated.
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Optical and transport studies on thin microcrystalline silicon films prepared by very high frequency glow discharge for solar cell applications
TL;DR: In this paper, the initial growth stage of phosphorus doped microcrystalline silicon films prepared by plasma enhanced chemical vapor deposition with different plasma excitation frequencies in the range 13.56-116 MHz was studied by Raman and infrared spectroscopy, optical transmission and reflection, and conductivity measurements.