Journal of Applied physics,Vol.33 : 1962年に発表されたレオロジー関連の論文

This page shows some examples of multimedia files. It is also available at: http://www.ieee-uffc.org/tr/mexample.pdf. For submission of multimedia manuscripts to TUFFC, please follow “Information for Contributors” at: http://www.ieeeuffc.org/tr/contrib.pdf. Multimedia Example Created by Jian-yu Lu, Editor-in-Chief, 07/07/03 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society 1. Color Figure: The IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (TUFFC) now accepts color figures online with corresponding grayscale figures in print without additional charges if authors follow the multimedia manuscript submission procedure in the “Information for Contributors”. The “color figures” icon below indicates in the print that a color version of the figure is available online. It also links to the color figure submitted originally by the authors for viewing details. Because of the sizes of color figures and the additional editorial work such as making two sets of PostScript files in which they remain identical after replacing grayscale with color, authors should request color figures online only when it is necessary. The color figure must be in JPEG (Joint Photographic Expert Group) or GIF (Graphics Interchange Format) format to reduce file size and to decrease the bandwidth usage on the TUFFC server. Fig. 1. An eight-layer printed circuit board (PCB) used primarily for multi-channel ultrasound signal reception and storage. The board was designed in the Ultrasound Lab at The University of Toledo, led by Dr. Jian-yu Lu. It is one of the many PCBs designed for a high-frame rate medical ultrasound imaging system [1], which consists of 128 linear, ±144V peak, 0.05-10MHz, and 12-bit arbitrary waveform generators for the production of ultrasound signals or for other research purposes. 2. Movies: Please click on the movie icon to see a movie. The two movies below give you an idea on the file size versus movie quality. “VCD quality” here means 1150kbits/s for video and 224kbits/s for 16-bit MP2 stereo audio at 44.1KHz sampling rate. Fig. 2. An introduction to the Ultrasound Lab at The University of Toledo. 3. Movies and Animations: Please click on the movie icons to see movies or animations. Fig. 3. Circuit design and construction of the imaging system. 4. Movies and Animation: Please click on the movie icons to see movies or animation. Movie [File size: 785KB; Format: MPEG1; Resolution: 320X240; Duration: 9 seconds]

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

Light–sound interactions have long been exploited in various acousto-optic devices based on bulk crystalline materials. Conventionally, these devices operate in megahertz frequency range where the acoustic wavelength is much longer than the optical wavelength and a long interaction length is required to attain significant coupling. With nanoscale transducers, acoustic waves with sub-optical wavelengths can now be excited to induce strong acousto-optic coupling in nanophotonic devices. Here we demonstrate microwave frequency surface acoustic wave transducers co-integrated with nanophotonic resonators on piezoelectric aluminum nitride substrates. Acousto-optic modulation of the resonance modes at above 10 GHz with the acoustic wavelength significantly below the optical wavelength is achieved. The phase and modal matching conditions in this scheme are investigated for efficient modulation. The new acousto-optic platform can lead to novel optical devices based on nonlinear Brillouin processes and provides a direct, wideband link between optical and microwave photons for microwave photonics and quantum optomechanics. Acousto-optic modulators use acoustic waves to control light on a chip. Here, the authors achieve modulation in nanophotonic resonators using microwave frequency surface acoustic waves with wavelength smaller than the optical wavelength towards highly integrated devices on silicon.

/pdf/sub-optical-wavelength-acoustic-wave-modulation-of-2mhwt3nx0m.pdf

Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies

Synthesis of c-axis oriented AlN thin films on different substrates: A review

Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.

https://iopscience.iop.org/article/10.1088/1674-4926/37/2/021001/pdf

Surface acoustic wave devices for sensor applications

Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient.

5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

We report in this paper on the study and the realization of surface acoustic wave devices based on an AlN/diamond layered structure intended for the X band (8 GHz). Both x-ray diffraction and transmission electronic microscopy, used for characterization of the structural properties of the AlN/diamond structure, have shown (002) highly oriented sputtered AlN films on free-standing chemical vapor deposition diamond films. Surface roughness of the AlN/diamond structure was measured by atomic force microscopy and showed a very low surface roughness, less than 1 nm. Low surface roughness is very important to reduce the acoustic propagation losses. SAW devices operating in the range of 8 GHz were realized by the combination of the high velocity of the AlN/diamond layered structure and the high lateral resolution obtained using e-beam lithography (EBL). Due to high electrical resistivity of the AlN film, interdigital transducers with submicronic resolution were patterned by an adapted technological EBL process. ...

High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography

Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

In this work, we report on the fabrication results of surface acoustic wave (SAW) devices operating at frequencies up to 8 GHz. In previous work, we have shown that high acoustic velocities (9 to 12 km/s) are obtained from the layered AIN/diamond structure. The interdigital transducers (IDT) made of aluminum with resolutions up to 250 nm were successfully patterned on AIN/diamond-layered structures with an adapted technological process. The uniformity and periodicity of IDT were confirmed by Held emission scanning electron microscopy and atomic force microscopy analyses. A highly oriented (002) piezoelectric aluminum nitride thin film was deposited on the nucleation side of the CVD diamond by magnetron sputtering technique. The X-ray diffraction effectuated on the AIN/diamond-layered structure exhibits high intensity peaks related to the (002) AlN and (111) diamond orientations. According to the calculated dispersion curves of velocity and the electromechanical coupling coefficient (K2), the AlN layer thickness was chosen in order to combine high velocity and high K2. Experimental data extracted from the fabricated SAW devices match with theoretical values quite well.

Combination of e-Beam Lithography and of High Velocity AlN/Diamond-Layered Structure for SAW Filters in X Band

In this work, we report on the fabrication results of SAW devices operating at frequencies up to 8GHz. In previous work, we have shown that high acoustic velocity (9 to 12 km/s) is obtained from the layered AlN/diamond structure. The interdigital transducers (IDTs) made in aluminum with resolutions down to 300nm were successfully patterned on AlN/diamond layered structures with an adapted technological process. The uniformity and periodicity of IDTs were corroborated by field emission scanning electron microscopy and atomic force microscopy analyses. Highly oriented (002) piezoelectric aluminum nitride thin film was deposited on nucleation side of CVD diamond by magnetron sputtering technique. The X-ray diffraction made on the AlN/diamond layered structure exhibits high intensity peaks related to the (002) AlN and (111) diamond orientations. According to the calculated dispersion curves of velocity and electromechanical coupling coefficient (K2 ), the AlN layer thickness was chosen in order to combine high velocity and high K2. Thus, the expected values predicted by calculation match quite well the experimental data extracted from fabricated SAW device

P. Kirsch

Papers

5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography

Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

Combination of e-Beam Lithography and of High Velocity AlN/Diamond-Layered Structure for SAW Filters in X Band

P3O-1 5GHz SAW Devices Based on AlN/Diamond Layered Structure