P
Peter Wright
Researcher at Stanford University
Publications - 45
Citations - 6838
Peter Wright is an academic researcher from Stanford University. The author has contributed to research in topics: Product (category theory) & Gate oxide. The author has an hindex of 23, co-authored 45 publications receiving 6405 citations.
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Journal ArticleDOI
IVB-7 the sidewall resistor—A novel test structure to reliably extract specific contact resistivity
TL;DR: In this article, the vertical sidewall resistor is used to extract the contact resistivity between pure A1 and WSi2 which turns out to be less than 5 x 10 to the -9th power ohm cm.
Journal ArticleDOI
VIB-8 the effect of a superconducting interconnect on circuit performance
Proceedings ArticleDOI
Single wafer in-situ multiprocessing
TL;DR: In this article, a novel single-wafer multiprocessing reactor for flexible VLSI manufacturing that combines lamp heating, remote microwave plasma processing, and photo processing in a single cold-wall chamber for multilayer in-situ growth and deposition of dielectrics, semiconductors, and metals is described.