R
Rogier Ellenbroek
Researcher at Delft University of Technology
Publications - 10
Citations - 207
Rogier Ellenbroek is an academic researcher from Delft University of Technology. The author has contributed to research in topics: Iterative learning control & Deformable mirror. The author has an hindex of 6, co-authored 10 publications receiving 198 citations. Previous affiliations of Rogier Ellenbroek include Eindhoven University of Technology & ASML Holding.
Papers
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Journal ArticleDOI
Adaptive Iterative Learning Control for High Precision Motion Systems
TL;DR: A ldquopiecewise ILCrdquo is proposed that leads to the design of a single learned feedforward signal suitable for different setpoints, and the results are experimentally shown to work for a high precision motion system.
Patent
Method of adaptive interactive learning control and a lithographic manufacturing process and apparatus employing such a method
TL;DR: In this article, an adaptive filter for the learned feed-forward loop is designed, which varies according to the momentary frequency content of the error signal and allows to discriminate between areas of deterministic and stochastic error.
Proceedings ArticleDOI
Time-frequency analysis of a motion system with learning control
TL;DR: The goal of the research presented in this paper is to integrate ILC applied to the wafer stage motion system with time-frequency analysis, which provides insight into the ILC shortcomings when the learning control technique is applied on the considered motion system.
Proceedings ArticleDOI
Validation of a new adaptive deformable mirror concept
Roger Hamelinck,Rogier Ellenbroek,Nick Rosielle,M Maarten Steinbuch,Michel Verhaegen,Niek Doelman +5 more
TL;DR: A new prototype adaptive deformable mirror for future AO-systems is presented that consists of a thin continuous membrane on which push-pull actuators impose out-of-plane displacements.
Proceedings ArticleDOI
Distributed control in adaptive optics: Deformable mirror and turbulence modeling
Rogier Ellenbroek,Michel Verhaegen,Niek Doelman,Roger Hamelinck,Nick Rosielle,M Maarten Steinbuch +5 more
TL;DR: In this paper, a distributed framework is introduced in which each actuator has a separate processor that can communicate with a few direct neighbors, and the wavefront reconstruction step is fitted into the distributed framework such that the computational complexity for each processor increases only linearly with the telescope diameter.