S
S. Bhaskar
Publications - 1
S. Bhaskar is an academic researcher. The author has contributed to research in topics: Breakdown voltage & Monolithic microwave integrated circuit. The author has co-authored 1 publications.
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Fabrication of double recess structure by single lithography step using silicon-nitride-assisted process in pseudomorphic HEMTs
K. Mahadeva Bhat,Saptarshi Pathak,G. Sai Saravanan,CG Sridhar,S. Bhaskar,S.L. Badnikar,H. P. Vyas,Rangarajan Muralidharan,Mahaveer K. Jain,Aryasomayajula Subrahmanyam +9 more
TL;DR: In this paper, a single mask processing technique for realizing double recess structure with the help of silicon nitride layer was presented, where two etching steps of silicon oxide and GaAs followed one after the other, generated the double recess structures, wherein the various etch times decide the width and shape of double recess.