Showing papers in "Microelectronic Engineering in 2014"

TL;DR: In this article, the Nyquist diagrams were used to identify an equivalent circuit and the fundamental parameters of the circuit, and the characteristics of crystallinity, morphology, photoluminescence and electrical conductivity of ZnO nanoparticles were investigated.

TL;DR: In this article, a hybrid fabrication method for graphene quantum dot devices with minimum feature sizes of 3nm and high yield is described, which is a combination of e-beam lithography and direct milling with the sub-nm focused helium ion beam generated by a helium ion microscope.

TL;DR: In this article, the photolysis of tin clusters of the type (RSn) 12 O 14 (OH) 6 ] X 2 using extreme ultraviolet (EUV, 13.5 ) light was studied.

TL;DR: In this paper, the electrical resistive response of an elastomeric composite material, composed of poly(dimethylsiloxane) (PDMS) and multi-walled carbon nanotubes (MWCNTs), to large mechanical deformations was investigated.

TL;DR: In this article, a maskless and scalable technique for fabricating nano-scale inverted pyramid structures suitable for light management in crystalline silicon solar cells was proposed, which suppress the total reflection at normal incidence to below 10% over the entire visible range.

TL;DR: In this article, the synergetic effect of oxidizer like H 2 O 2 and complexing agent like glycine on the cobalt polishing performance was investigated, and it was revealed that the static etching rate (SER) and removal rate (RR) are gradually suppressed with increasing pH due to the formation of compact and passive cobalt oxides.

TL;DR: In this article, the authors present results that show combined antireflectivity, superhydrophobicity and superamphiphobicity for optimal plasma treatment time of only one side of the samples (better results are expected for two-side treatment).

TL;DR: In this paper, the extensibility of conductive circuits constructed by screen printing was investigated with four kinds of circuit designs: (single line, rectangular pulse, horseshoe and zigzag) all circuits were screen-printed on a thermoplastic polyurethane substrate using silver nanopaste They were then sintered at 150°C in air for various lengths of time (15, 30, 45, 60

TL;DR: Simulation flow for the die-scale assessment of interconnect stress-migration (SM) and electromigration (EM) with an accounted variation of residual stress was developed in this article.

TL;DR: It is shown that a previously reported two-parameter empirical logarithmic law accurately describes the dependency of aspect ratio on trench width over a wide range of widths and etch parameters, including the sub-micrometer regime.

TL;DR: In this article, a degradation phenomenon of the Cu6Sn5 IMC in SLID interconnects was found, caused by porosity due to a corrosive reaction with flux residues.

TL;DR: In this article, a review of cantilever design and fabrication for shear-force/mass-detection/IR-sensitive/combination of STM and AFM is presented.

TL;DR: In this paper, a fabrication technique that increases the resistance of PDMS to deformation under pressure driven flow and chemical solvents swelling without the use of any foreign materials is presented.

TL;DR: In this article, a one-step, room-temperature, hydrothermal process on sputtered-aluminum thin substrates, in which the metal substrate acts as both reactant and support, is described.

TL;DR: In this article, a simple and rapid fabrication method for a semiellipsoid microlens array has been proposed, where two different photoresist layers are firstly coated on a silicon wafer in sequence.

TL;DR: In this paper, a model for spray pyrolysis deposition is developed and implemented within a Level Set framework, with an electric and a pressure atomizing nozzle, and the resulting film growth is modeled as a layer by layer deposition of the individual droplets which reach the wafer surface or as a CVD-like process, depending on whether the droplets form a vapor near the interface or if they deposit a film only after surface collision.

TL;DR: In this article, the authors presented the fabrication and characterization of Ti and Au coated hollow silicon microneedles for transdermal drug delivery applications using isotropic etching followed by anisotropic etching.

TL;DR: In this paper, the effect of absorbed moisture on the electrical characteristics and reliability of low dielectric constant materials (low-k) was investigated, and the experimental results reveal that porous low-k dielectrics absorb more moisture than dense low k Dielectrics.

TL;DR: In this article, a passive micromixer with zigzag geometry is demonstrated to perform simultaneously mixing of a restriction enzyme with DNA and digestion of DNA, and the total length required for complete mixing is estimated by simulation.

TL;DR: In this article, a novel alkaline chelating agent with functionalities of BTA removal was designed for advanced post CMP cleaning solution, which is used as main composition of cleaning agent.

TL;DR: In this article, a promising ultrasound wearable technology based on a piezoelectric transducer, realized on flexible highly oriented Aluminum Nitride, with significant mechanical displacement in spite of being attached on a rigid support, is presented.

TL;DR: In this article, the magnetization curves and XPS (O 1s) spectra of the as-prepared and Ar-annealed SrTi0.95Fe0.05O3 nanopowders were shown.

TL;DR: In this paper, the authors used spatially resolved micro Raman spectroscopy to map the full width at half maximum (FWHM) of the graphene G-band and the 2D and G peak positions, for as-grown graphene on copper catalyst layers, for transferred CVD graphene and for micromechanically exfoliated graphene, in order to characterize the effects of a transfer process on graphene properties.

TL;DR: In this article, the effect of light intensity on junction properties of CdO nanorods was analyzed by X-ray diffraction and AFM measurements and the structural properties were analyzed.

TL;DR: A photo organic field effect transistor using the blend of poly(3hexylthiophene) (P3HT) and [6,6]-phenyl C61-butyric acid methylester (PCBM) as active layer was fabricated in MESFET type configuration with top gate and bottom drain source contacts on glass substrate as discussed by the authors.

TL;DR: In this article, the authors investigated the effects of polydimethylsiloxane (PDMS) channel wall thickness on the insertion loss and the particle migration to the pressure node due to acoustic radiation forces induced by Rayleigh SAW.

TL;DR: In this article, a microfluidic chip for blood plasma separation with gradual filtration was developed, which consisted of front-end cell capture structures and back-end filters.

TL;DR: In this paper, first principles simulations were employed to gain atomistic insights on the working principles of amorphous HfO2 based resistive Random Access Memory stack: the nature of the defect responsible for the switching between the High and Low Resistive States has been unambiguously identified to be the substoichiometric Hf sites (commonly called oxygen vacancy-VO) and the kinetics of the process have been investigated through the study of O diffusion.

TL;DR: Experimental results show that thismicropump is capable of generating fluid flow of 0.15 μL/min at the frequency of 2 Hz, corresponding to a volume resolution of 1 nL per stroke, and working reliably against a maximum back-pressure of 550 Pa, demonstrating the potential application of this micropump for various integrated lab-on-a-chip systems.

TL;DR: In this article, a method for injection molding antireflective nanostructures on large areas, for high volume production, was presented, and the visible spectrum reflectance of injection moulded black polypropylene surfaces was reduced from 4.5+/-0.5% to 2.5 +/- 0.5%.