A method for fabricating a semiconductor device, in which a lifting phenomenon can be prevented from occurring in forming an amorphous carbon film on an etched layer having tensile stress. According to the invention, since a compression stress on the etched layer or the amorphous carbon film can be reduced or a compression stress film is formed between the etched layer or the amorphous carbon film to prevent a lifting phenomenon from occurring and thus another pattern can be formed to fabricate a highly integrated semiconductor device.

Method for Fabricating Semiconductor Device

A semiconductor device includes a via structure and a conductive structure. The via structure has a surface with a planar portion and a protrusion portion. The conductive structure is formed over at least part of the planar portion and not over at least part of the protrusion portion of the via structure. For example, the conductive structure is formed only onto the planar portion and not onto any of the protrusion portion for forming high quality connection between the conductive structure and the via structure.

Semiconductor Device and Method of Fabricating the Same

A method for fabricating a semiconductor device includes forming a recess gate over a semiconductor substrate. A gate spacer is formed on a sidewall of the recess gate. The semiconductor substrate in a landing plug contact region is soft-etched to form a recess having a rounded profile. A sidewall spacer is formed over the gate spacer and a sidewall of the recess. An insulating film is formed over the semiconductor substrate. The insulating film is selectively etched to form a landing plug contact hole. A conductive layer in the landing plug contact hole is filled to form a landing plug.

Semiconductor Device and Method for Fabricating the Same

This paper reviews electrostatic discharge (ESD) investigations on laterally diffused MOS (LDMOS) and drain-extended MOS (DeMOS) devices. The limits of the safe operating area of LDMOS/DeMOS devices and device physics under ESD stress are discussed under various biasing conditions and layout schemes. Specifically, the root cause of early filament formation is highlighted. Differences in filamentary nature among various LDMOS/DeMOS devices are shown. Based on the physical understanding, device optimization guidelines are given. Finally, an outlook on technology scaling is presented.

A Review on the ESD Robustness of Drain-Extended MOS Devices

A semiconductor structure. The semiconductor structure includes a semiconductor substrate, a first transistor on the semiconductor substrate, and a guard ring on the semiconductor substrate. The semiconductor substrate includes a top substrate surface which defines a reference direction perpendicular to the top substrate surface. The guard ring includes a semiconductor material doped with a doping polarity. A first doping profile of a first doped transistor region of the first transistor in the reference direction and a second doping profile of a first doped guard-ring region of the guard ring in the reference direction are essentially a same doping profile. The guard ring forms a closed loop around the first transistor.

Guard ring structures for high voltage CMOS/low voltage CMOS technology using LDMOS (lateral double-diffused metal oxide semiconductor) device fabrication

An electrostatic discharge (ESD) protection device and a fabrication method thereof are provided. The ESD protection device with an embedded high-voltage P type SCR (EHVPSCR) structure of the present invention is employed to guide the ESD current/voltage to a system voltage trace VDD via a pad.

Electrostatic discharge protection device and fabrication method thereof

A LDNMOS device for an ESD protection circuit including a P-type substrate and an N-type deep well region is provided. The P-type substrate includes a first area and a second area. The N-type deep well region is in the first and second areas of the P-type substrate. The LDNMOS device further includes a gate electrode disposed on the P-type substrate between the first and second areas, a P-type implanted region disposed in the first area of the P-type substrate, an N-type grade region disposed in the N-type deep well region of the first area, an N-type first doped region disposed in the N-type grade region, a P-type body region disposed in the N-type deep well region of the second area, an N-type second doped region disposed in the P-type body region, and a P-type doped region disposed in the P-type body region and adjacent to the N-type second doped region.

Device for esd protection circuit

A fin diode structure and method of manufacturing the same is provided in present invention, which the structure includes a substrate, a doped well formed in the substrate, a plurality of fins of first conductivity type and a plurality of fins of second conductivity type protruding from the doped well, and a doped region of first conductivity type formed globally in the substrate between the fins of first conductivity type, the fins of second conductivity type, the shallow trench isolation and the doped well and connecting with the fins of first doped type and the fins of second doped type.

Fin diode structure

ESD protection designs for smart power applications with lateral double-diffused MOS (LDMOS) transistor were proposed. With the proposed ESD detection circuits, the n-channel LDMOS can be quickly turned on to protect the output drivers during ESD stress. The proposed ESD protection circuits have been successfully verified in a 0.35-µm 5-V/40-V bipolar CMOS DMOS (BCD) process. In addition, the power-rail ESD protection design can be also achieved with stacked structure to protect 40-V power pins without latchup issue in the smart power ICs.

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ESD protection design with lateral DMOS transistor in 40-V BCD technology

The ESD protection circuit is electrically connected between a first power rail and a second power rail, and includes an ESD protection device, a switching device electrically connected between the ESD protection device and a first power rail, and a low-pass filter electrically connected between the first power rail and the first switching device. The ESD protection device includes a BJT and a first resistor electrically connected between a base of the BJT and a first power rail. When no ESD event occurs, a potential of the base is larger than or equal to a potential of an emitter of the BJT. When the ESD event occurs, the potential of the base is smaller than the potential of the emitter.

Tien-Hao Tang

Papers

Electrostatic discharge protection device and fabrication method thereof

Device for esd protection circuit

Fin diode structure

ESD protection design with lateral DMOS transistor in 40-V BCD technology

ESD protection circuit and ESD protection device thereof