V
Viljami Pore
Researcher at ASM International
Publications - 82
Citations - 4213
Viljami Pore is an academic researcher from ASM International. The author has contributed to research in topics: Atomic layer deposition & Thin film. The author has an hindex of 34, co-authored 82 publications receiving 4086 citations. Previous affiliations of Viljami Pore include University of Helsinki.
Papers
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Journal ArticleDOI
Photoswitchable Superabsorbency Based on Nanocellulose Aerogels
Marjo Kettunen,Riitta Silvennoinen,Nikolay Houbenov,Antti Nykänen,Janne Ruokolainen,Jani Sainio,Viljami Pore,Marianna Kemell,Mikael Ankerfors,Tom Lindström,Mikko Ritala,Robin H. A. Ras,Olli Ikkala +12 more
TL;DR: In this article, a thin titanium dioxide (TiO2) film on lightweight native nanocellulose aerogels offers a novel type of functional material that shows photoswitching between water-superabsorbent and water-repellent states.
Journal ArticleDOI
Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water
TL;DR: Titanium dioxide thin films were grown by atomic layer deposition (ALD) at 200-400°C from a new titanium precursor, titanium tetramethoxide, and water as mentioned in this paper.
Patent
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
TL;DR: In this article, a method and precursors for depositing silicon nitride films by atomic layer deposition (ALD) are provided. In some embodiments, the silicon pre-requisites comprise an iodine ligand.
Patent
Metal silicide, metal germanide, methods for making the same
TL;DR: In this paper, methods for forming metal silicide can include forming a non-oxide interface, such as germanium or solid antimony, over exposed silicon regions of a substrate.
Journal ArticleDOI
Atomic layer deposition in nanometer-level replication of cellulosic substances and preparation of photocatalytic TiO2/cellulose composites.
TL;DR: TheTiO2/cellulose composites are mechanically more stable than the free-standing TiO2 replicas and are therefore potentially suitable as lightweight, high surface area photocatalysts.