Y
Y. Bluhm
Researcher at Max Planck Society
Publications - 1
Citations - 82
Y. Bluhm is an academic researcher from Max Planck Society. The author has contributed to research in topics: Wire bonding & Wafer. The author has an hindex of 1, co-authored 1 publications receiving 77 citations.
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Fundamental issues in wafer bonding
Ulrich Gösele,Ulrich Gösele,Y. Bluhm,G. Kästner,P. Kopperschmidt,Gertrud Dr. Kräuter,Roland Scholz,Andreas Schumacher,St. Senz,Q.-Y. Tong,Q.-Y. Tong,Q.-Y. Tong,L.-J. Huang,Y.-L. Chao,T.-H. Lee +14 more
TL;DR: In this paper, the basic issues associated with semiconductor wafer bonding such as the reactions at the bonding interface during hydrophobic and hydrophilic bonding, as well as during ultrahigh vacuum bonding are discussed.