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Yaqi Ma
Researcher at Fudan University
Publications - 9
Citations - 61
Yaqi Ma is an academic researcher from Fudan University. The author has contributed to research in topics: Electron-beam lithography & Lithography. The author has an hindex of 4, co-authored 9 publications receiving 50 citations.
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Processing study of SU-8 pillar profiles with high aspect ratio by electron-beam lithography
TL;DR: In this paper, the fabrication of micro-pitched SU-8 pillar arrays with height up to 5µm and aspect ratio of 7.14:1 by electron beam lithography (EBL) at 100keV, combined with a hot developing process was reported.
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Gold nanopillar arrays as biosensors fabricated by electron beam lithography combined with electroplating
TL;DR: The experiments indicate that the fabricated nanopillar arrays in Au demonstrate the promising capability of refractive index sensing with sensitivity of 270 nm/refractive index unit, and it was discovered that the resonant absorption becomes stronger when the light incident angle is increased.
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Ultra-tall sub-wavelength gold nano pillars for high sensitive LSPR sensors
TL;DR: In this paper, a numerical simulation by the method of finite-difference time-domain shows that the sensitivity can be enhanced by either increasing the height or narrowing down the gap between the pillars.
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Simulation and experimental study of aspect ratio limitation in Fresnel zone plates for hard-x-ray optics.
Jianpeng Liu,Jinhai Shao,Sichao Zhang,Yaqi Ma,Nit Taksatorn,Chengwen Mao,Yifang Chen,Biao Deng,Tiqiao Xiao +8 more
TL;DR: The aspect ratio limit in polymethyl methacrylate by electron-beam lithography under 100 keV should be extremely useful for guiding further technical development in nanofabrication of high-quality Fresnel zone plates.
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Design and fabrication of structural color by local surface plasmonic meta-molecules*
TL;DR: In this paper, a new form of nanostructures with Al film deposited on a patterned dielectric material for generating structural color, which is induced by local surface plasmonic resonant (LSPR) absorption in sub-wavelength-indented hole/ring arrays.