Y
Yongli Huang
Researcher at Stanford University
Publications - 24
Citations - 1466
Yongli Huang is an academic researcher from Stanford University. The author has contributed to research in topics: Capacitive micromachined ultrasonic transducers & Ultrasonic sensor. The author has an hindex of 17, co-authored 24 publications receiving 1396 citations.
Papers
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Journal ArticleDOI
Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology
TL;DR: In this paper, a new method for fabricating capacitive micromachined ultrasonic transducers (CMUTs) that uses a wafer bonding technique is introduced. But the method is not suitable for large CMUTs.
Journal ArticleDOI
Capacitive micromachined ultrasonic transducers: fabrication technology
TL;DR: It was concluded that wafer-bonded cMUT technology was superior in terms of process control, yield, and uniformity because the number of steps and consequent process time were reduced and turn-around time was improved significantly.
Patent
Micromachined ultrasonic transducers and method of fabrication
TL;DR: In this article, the authors described a micromachined ultrasonic transducers (MUTS) and a method of fabrication, where the membranes of the transducers are fusion bonded to cavities to form cells.
PatentDOI
Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same
TL;DR: In this article, a CMUT array is constructed on a front side of a very high conductivity silicon substrate, and through wafer trenches are etched into the substrate from the backside of the substrate to electrically isolate individual CMUT elements formed on the front side.
Patent
Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane
TL;DR: In this article, the structure for capacitive micromachined ultrasonic transducer (CMUT) device or other vibrating membrane device having non-uniform membrane so that membrane mass and stiffness characteristics may be substantially independently adjusted is described.