Z
Z. F. Fan
Publications - 2
Citations - 669
Z. F. Fan is an academic researcher. The author has contributed to research in topics: Auger electron spectroscopy & Etching (microfabrication). The author has an hindex of 2, co-authored 2 publications receiving 653 citations.
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Low resistance ohmic contacts on wide band‐gap GaN
TL;DR: In this article, a new metallization process for achieving low resistance ohmic contacts to molecular beam epitaxy grown n−GaN (∼1017 cm−3) using an Al/Ti bilayer metallisation scheme was reported.
Journal ArticleDOI
Reactive ion etching of GaN using BCl3
TL;DR: In this paper, an etch rate of 8.5 A/s was obtained with the BCl3 plasma for a plasma power of 200 W, pressure of 10 mTorr, and flow rate of 40 sccm.