Z
Zhenjiang Cui
Researcher at Applied Materials
Publications - 38
Citations - 1120
Zhenjiang Cui is an academic researcher from Applied Materials. The author has contributed to research in topics: Layer (electronics) & Dielectric. The author has an hindex of 15, co-authored 38 publications receiving 1120 citations.
Papers
More filters
Patent
Post treatment of low k dielectric films
Zhenjiang Cui,Josephine J. Chang,Alexandros T. Demos,Reza Arghavani,Derek R. Witty,Helen R. Armer,Girish Dixit,Hichem M'Saad +7 more
TL;DR: In this article, a method of depositing a low dielectric constant film on a substrate and post-treating the low-dielectric-constant film is provided.
Patent
Method for critical dimension shrink using conformal pecvd films
Li-Qun Xia,Mihaela Balseanu,Mei-Yee Shek,SiYi Li,Zhenjiang Cui,Mehul Naik,Michael D. Armacost,William H. McClintock +7 more
TL;DR: In this article, a pattern recess is etched into a substrate by conventional lithography, and a thin conformal layer is formed over the surface of the substrate, including the sidewalls and bottom of the pattern recess.
Patent
Post-ash sidewall healing
TL;DR: In this paper, the authors used a gas phase etch which is selective towards the oxygen-rich portion of the low-K dielectric layer of an integrated circuit to decrease the effective dielectrics constant present between two conducting components.
Patent
Adhesion improvement for low k dielectrics to conductive materials
TL;DR: In this paper, a method for processing a substrate for depositing an adhesion layer between a conductive material and a dielectric layer is presented, which is based on the idea of using a reducing compound or a silicon-based compound.
Patent
Cleaning high aspect ratio vias
TL;DR: In this article, a method of removing amorphous silicon/silicon oxide film stack from vias is described, which is particularly well suited for 3D NAND (e.g. VNAND) device formation.