Journal ArticleDOI
A study of cones developed by ion-bombardment of gold
Reads0
Chats0
TLDR
In this article, a high cone density was found to be characteristic of amorphous (mechanically polished) surfaces whilst a low cone density with height contrast of the individual grains was discovered on polycrystalline (etched) surfaces.Abstract:
Argon and xenon bombardment of gold surfaces at 5 to 20 keV resulted in considerable erosion and the formation of cones. A high cone density was found to be characteristic of amorphous (mechanically polished) surfaces whilst a low cone density with height contrast of the individual grains was discovered on polycrystalline (etched) surfaces. The cone angles were found to vary only slowly with energy, indicating an ion/atom potential that varied much more rapidly with separation than predicted by using a screened coulomb potential.read more
Citations
More filters
Journal ArticleDOI
A mechanism of surface micro-roughening by ion bombardment
TL;DR: The spatial distribution of sputter-etch effects is analyzed theoretically under the assumption of random slowing-down of the bombarding ions as discussed by the authors, and it is concluded that a microscopically flat surface is unstable under high-dose ion bombardment unless atom migration acts as a dominating smoothing effect.
Journal ArticleDOI
Sputtering—a review of some recent experimental and theoretical aspects
TL;DR: In this article, a brief outline of the present sputtering theory for a random solid, recent results of the sputtering yieldS for polycrystalline targets are discussed, in particular in view of the influence of the projectile mass and the bombarding angle.
Journal ArticleDOI
Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolution
David J. Barber,Frederick Charles Frank,Frederick Charles Frank,M. Moss,M. Moss,John W Steeds,John W Steeds,I. S. T. Tsong +7 more
TL;DR: In this article, the two kinematic theorems of crystal dissolution by Frank are applied to surfaces undergoing ion-bombardment in order to determine the topographies evolved in any given time.
Journal ArticleDOI
Local Electrode Atom Probes
Thomas F. Kelly,D. J. Larson +1 more
TL;DR: Local Electrode Atom Probes (LEAPs) as discussed by the authors are an important tool for materials characterization at the atomic scale. But their performance has not yet reached the state-of-the-art.
Journal ArticleDOI
The topography of sputtered semiconductors
TL;DR: In this article, the surfaces of semiconductor single crystals were observed using a scanning electron microscope after bombardment at normal incidence at room temperature with doses between 0.5 × 1018 and 3 ×1018 of 40 keV argon ions/cm2.
References
More filters
Journal ArticleDOI
Collection and Sputtering Experiments with Noble Gas Ions
TL;DR: In this paper, the collection and sputtering experiments described in this paper were made with the 90° electromagnetic isotope separator in our laboratory and were made using a 90° EIS separator.
Journal ArticleDOI
Microtopography of Surfaces Eroded by Ion-Bombardment
A. D. G. Stewart,M. W. Thompson +1 more
TL;DR: In this paper, the principal peak in the graph of sputtering rate versus angle of ion incidence was shown to correspond to a half-angle corresponding to the peak of the graph.
Book ChapterDOI
Sputtering by Ion Bombardment
TL;DR: In this article, various methods for measuring sputtering by ion bombardment such as the glow discharge, low pressure glow discharge with magnetic field, and low pressure supported plasmas, and ion beam methods are discussed.
Journal ArticleDOI
Single-crystal sputtering including the channeling phenomenon.
TL;DR: In this paper, the angular behavior of the sputtering ratio for Ar+ on (100) Cu turned around a [011] axis was studied for energies of 5, 10, 15, 20, and 35 V.
Journal ArticleDOI
Influence of the Angle of Incidence on Sputtering Yields
TL;DR: In this article, shadow micrographs of the spheres before and after sputtering were used to determine the influence of the angle of incidence on sputtering yields of small metal spheres.