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Journal ArticleDOI

An ellipsometer for following film growth

Jack L. Ord
- 01 Aug 1969 - 
- Vol. 16, pp 155-165
TLDR
In this article, an ellipsometer was constructed for use in film growth studies which require a resolution of 0.01° and a nulling time on the order of 1 sec. The polarizer and analyzer are driven by stepping motors which may be stepped in either direction by pulses sent from the control system to the motor translator.
About
This article is published in Surface Science.The article was published on 1969-08-01. It has received 31 citations till now. The article focuses on the topics: Spectrum analyzer.

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Citations
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Journal ArticleDOI

Recent developments in instrumentation in ellipsometry

TL;DR: The present status of ellipsometric measurement capability is reviewed in this article, where significant advances since the last ellipsometry conference are highlighted, as well as the present state of the ellipsometrical measurement capability.
Journal ArticleDOI

Present status of automatic ellipsometers

TL;DR: In this paper, operating principles and capabilities of presently-built automatic ellipsometers are evaluated and compared on the basis of uniform performance criteria, and possible future developments are indicated; the instruments are classified according to their optical principles of operation and their capabilities.

Present status of automatic ellipsometers

TL;DR: The instruments are classified according to their optical principles of operation and their capabilities are compared on the basis of uniform performance criteria to derive operating principles and capabilities of presently-built automatic ellipsometers.
Journal ArticleDOI

Modulation ellipsometry and its application to the study of the electrode-electrolyte interface

TL;DR: In this article, a methodology was developed for following rapidly small changes of the ellipsometric parameters Δ 0 and ψ 0 and of the reflectivity necessary for the unique determination of n = n − i k and thickness of a surface film.
References
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Journal ArticleDOI

Correlation Between Ellipsometric and Electrical Measurements on Passive Iron

TL;DR: In this paper, optical measurements of surface layers on passive iron electrodes are compared with electrical measurements of capacitance and other overpotential parameters, and it is shown that the surface layer on the electrode may be regarded as consisting of more than one part.
Journal ArticleDOI

A computer-operated following ellipsometer.

TL;DR: This paper describes the construction and performance of a computer-operated following ellipsometer that has been used successfully for in situ studies of the buildup and removal of thin anodic oxide films.
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