Analysis of Generation and Detection of Surface and Bulk Acoustic Waves by Interdigital Transducers

TLDR: In this article, a method of analysis which uses a combination of analytical and numerical techniques has been developed to obtain an accurate solution to the coupled electromagnetic and acoustic fields set up by an interdigital transducer on the surface of a piezoelectric substrate.

Abstract: Ahrroct-A method of analysis which uses a combination of analytical and numerical techniques has been developed to obtain an accurate solution to the coupled electromagnetic and acoustic fields set up by an interdigital transducer on the surface of a piezoelectric substrate. Full account is taken of the coupling to bulk modes as well as surface modes, and the solution for the charge on the electrodes includes both electrostatic charge and piezoelectrically regenerated charge. Programs have been written for interdigital arrays with uniform aperture but varying electrode width and pitch and arbitrary electrical connections. The theory is also valid for arbitrary crystal orientations. Generation and detection may be analyzed separately with information being provided on the partition of power into the various acoustic modes and the external load impedance, and the bulk wave radiation patterns are also computed. The program may also be used to find the insertion loss of a pair of transducers. Results are presented for the BleusteinGulyaev orientation of PZT-4 ceramic and the YZ and 41” rotated YX orientations of lithium niobate.