Journal ArticleDOI
Blister formation in Pd gate MIS hydrogen sensors
Marten Armgarth,Claes Nylander +1 more
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TLDR
In this paper, the metal defects are due to hydrogen induced stresses in the palladium film and the degradation can be avoided by being aware of this problem and avoiding the degradation in the future.Abstract:
Blister formation in palladium gate metal-insulator-semiconductor hydrogen sensors occurs even at low hydrogen pressures and leads to erroneous measurements. The metal defects are due to hydrogen induced stresses in the palladium film. Being aware of this problem, the degradation can be avoided.read more
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Journal ArticleDOI
Solid‐state sensors for trace hydrogen gas detection
TL;DR: In this paper, the development, history, theoretical basis, and experimental performance of solid-state hydrogen detectors under flow-through conditions available to date such as pyroelectric, piezoelectric, fiber optic, and electrochemical devices are reviewed.
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Micromirror optical-fiber hydrogen sensor
TL;DR: In this paper, a new hydrogen sensor was reported that operates by measuring changes in the reflectivity of thin palladium films deposited on the end of an optical fiber when exposed to hydrogen gas.
Journal ArticleDOI
Physics with catalytic metal gate chemical sensors
TL;DR: The use of chemical sensors, i.e., devices which can continuously monitor the concentration of a given species, is rapidly growing as mentioned in this paper, and there are several reasons for this.
Journal ArticleDOI
Hydrogen Sensing Mechanisms of Metal−Insulator Interfaces
TL;DR: The hydrogen sensitivity of palladium-silicon dioxidesilicon (Pd-MOS) structures was demonstrated about 25 years ago as discussed by the authors, and one of the most interesting features of the PdMOS device as a hydrogen sensor was shown.
Journal ArticleDOI
Low power gas detection with FET sensors
Ignaz Eisele,T. Doll,M. Burgmair +2 more
TL;DR: The work function principle of gas sensing is dedicated for room or slightly elevated temperatures of operation as signal contributions from both physisorption and chemisorsion will be detectable as discussed by the authors.