Journal ArticleDOI
CASINO: A new monte Carlo code in C language for electron beam interactions—part III: Stopping power at low energies
TLDR
In this paper, the stopping power for a given element or compound of interest can easily be performed and used in the CASINO program and the resulting effect of using these stopping powers in Monte Carlo simulations is generally to increase the backscattering coefficient.Abstract:
This paper is a description of the stopping power routine utilized in the CASINO program that is based on the experimental measurement of the energy loss function (ELF). In addition, we present an ANSI C standard program that can be used to generate the data needed for the stopping power routine. Both optical and energy loss spectrum (ELS) measurements of the ELF can be used as input to compute the stopping power. For ELS, only the single scattering spectrum is needed. Hence, measurement of the stopping power for a given element or compound of interest can easily be performed and used in the CASINO program. The resulting effect of using these stopping powers in Monte Carlo simulations is generally to increase the backscattering coefficient. Except for carbon, the change of stopping power for pure elements so far compiled is relatively small. In some compounds (i.e., Al2O3 and ZnSe), the discrepancy with the Joy and Luo (1989) expression is significant.read more
Citations
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Proton beam writing
TL;DR: Proton beam (p-beam) writing as discussed by the authors is a direct writing process that uses a focused beam of MeV protons to pattern resist material at nanodimensions, which is similar in many ways to direct writing using electrons.
Journal ArticleDOI
CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program
TL;DR: The CASINO program as discussed by the authors is a single scattering Monte CArlo SImulation of electroN trajectory in sOlid specially designed for low-beam interaction in a bulk and thin foil.
Journal ArticleDOI
Ion beam lithography and nanofabrication: a review
TL;DR: In this article, the physical principles underlying ion beam interactions with materials are described, together with a comparison with other lithographic techniques (electron beam writing a, p-beam writing, and ion projection projection lithography).
Journal ArticleDOI
CASINO: A new monte carlo code in C language for electron beam interactions—part II: Tabulated values of the mott cross section
TL;DR: In this article, the Mott cross section computed in the work of Czyzewski et al. is used to compute the polar angle of collision for the first 94 elements of the Periodic Table.
Journal ArticleDOI
Determination of low-Z elements in individual environmental particles using windowless EPMA
TL;DR: Despite the many fundamental problematic analytical factors involved in the observation of X-rays from low-Z elements, the Monte Carlo calculation proves to be quite reliable to evaluate those matrix and geometric effects.
References
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Journal ArticleDOI
Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie
Journal ArticleDOI
CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program
TL;DR: The CASINO program as discussed by the authors is a single scattering Monte CArlo SImulation of electroN trajectory in sOlid specially designed for low-beam interaction in a bulk and thin foil.
Journal ArticleDOI
An empirical stopping power relationship for low‐energy electrons
David C. Joy,S. Luo +1 more
Book ChapterDOI
Optical constants of solids by electron spectroscopy
Journal ArticleDOI
A database on electron‐solid interactions
TL;DR: In this article, a collection of data, including secondary and backscattered electron yields, electron stopping powers, and x-ray ionization cross sections, as a function of energy, has been assembled from published sources.