Journal ArticleDOI
Dynamic pull-in phenomenon in MEMS resonators
TLDR
In this paper, the pull-in instability in microelectromechanical (MEMS) resonators was studied and the authors proposed a low-voltage MEMS RF switch actuated with a combined DC and AC loading, which uses a voltage much lower than the traditionally used DC voltage.Abstract:
We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.read more
Citations
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Journal ArticleDOI
Nonlinear non-classical microscale beams: Static bending, postbuckling and free vibration
TL;DR: In this article, a nonlinear equation of motion was derived by using a combination of the modified couple stress theory and Hamilton's principle, which is conducted within the context of non-classical continuum mechanics, by introducing a material length scale parameter.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors
TL;DR: This work describes a comprehensive nonlinear multiphysics model based on the Euler-Bernoulli equation which includes both mechanical and electrostatic nonlinearities valid up to displacements comparable to the gap in the case of an electrostatically actuated doubly clamped beam.
Journal ArticleDOI
Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures
TL;DR: In this article, the dynamic pull-in instability of double clamped microscale beams actuated by a suddenly applied distributed electrostatic force and subjected to non-linear squeeze film damping is investigated.
Journal ArticleDOI
On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators
TL;DR: In this article, the authors present modeling, analysis and experimental investigation for nonlinear resonances and the dynamic pull-in instability in electrostatically actuated resonators, which are induced by exciting a microstructure with nonlinear forcing composed of a dc parallel-plate electrostatic load superimposed on an ac harmonic load.
References
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Book
Introduction to perturbation techniques
TL;DR: In this paper, the authors introduce the notion of forced Oscillations of the Duffing Equation and the Mathieu Equation for weakly nonlinear systems with quadratic and cubic nonlinearities.
Journal ArticleDOI
A reduced-order model for electrically actuated microbeam-based MEMS
TL;DR: In this paper, a reduced-order model is proposed to investigate the behavior of electrically actuated microbeam-based MEMS devices by discretizing the distributed-parameter system using a Galerkin procedure into a finite-degree-of-freedom system consisting of ordinary-differential equations in time.
Journal ArticleDOI
Characterization of the mechanical behavior of an electrically actuated microbeam
TL;DR: In this article, a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing of the air gap capacitor, the restoring force of the microbeam and the axial load applied to the micro-beam is presented.
Journal ArticleDOI
A study of the nonlinear response of a resonant micro-beam to an electric actuation
Mohammad I. Younis,A. H. Nayfeh +1 more
TL;DR: In this article, a nonlinear model is used to account for the midplane stretching, a DC electrostatic force, and an ACharmonic force in the response of a resonant microbeam to an electric actuation.