Journal ArticleDOI
Ellipsometric Parameters of Rough Surfaces and of a System Substrate-Thin Film with Rough Boundaries
Ivan Ohlídal,F. Lukeš +1 more
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TLDR
In this paper, the Kirchhoff theory of diffraction was extended to the case of a simple randomly rough surface, and the influence of surface roughness on the ellipsometric parameters was investigated.Abstract:
The theory of the influence of surface roughness on the ellipsometric parameters j and of simple randomly rough surface is developed in the framework of the Kirchhoff theory of diffraction. This theory is also extended to the following systems: rough surface—isotropic homogeneous identical film (both ambient-film and film substrate boundaries are geometrically identical; and rough surface—isotropic homogeneous general film (both boundaries are geometrically, and therefore also statistically, independent). Also the numerical analysis of the theoretical results is performed and the most important aspects of dependencies of j and on surface roughness (characterized by slopes of the height irregularities) and of the angle of incidence are found which enable us to determine the values of these slopes. The correctness of the theory is demonstrated on a system formed by the rough surface of a silicon single crystal covered with natural surface film, with the character of an identical film. It is shown that w...read more
Citations
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Journal ArticleDOI
Optical techniques for on-line measurement of surface topography
T.V. Vorburger,E C. Teague +1 more
TL;DR: In this article, the state-of-the-art in a number of optical techniques including specular reflectance, total integrated scatter, diffuseness, angular scattering distributions, speckle, ellipsometry, and interferometry are reviewed.
Journal ArticleDOI
Rough silicon surfaces studied by optical methods
TL;DR: In this paper, a detailed analysis of influence of random surface roughness on values of ellipsometric parameters and reflectance of a simple rough boundary of silicon and of a system silicon substrate-nonabsorbing thin film with rough boundaries is presented.
Journal ArticleDOI
Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces
Daniel Franta,Ivan Ohlídal +1 more
TL;DR: In this paper, a theoretical analysis of the correctness of applying the effective medium approximation (EMA) at the ellipsometric studies of rough surfaces is presented within this analysis the Rayleigh-Rice theory (RRT) is used to calculate the simulated ellipsomet data of various slightly randomly rough surfaces This simulated data are treated using the least-squares method for finding the values of the parameters characterizing the rough surfaces within the EMA, i.e. values of thickness and packing density factor describing a fictitious (effective) thin films replacing these surfaces within EMA.
Book ChapterDOI
Ellipsometry of Thin Film Systems
Ivan Ohlídal,Daniel Franta +1 more
TL;DR: A review of both theoretical and experimental results concerning ellipsometry is presented in this article, where the authors present a review of the most important theoretical results for ellipsometric geometry.
Journal ArticleDOI
Optics of rough surfaces, discontinuous films and heterogeneous materials
TL;DR: In this article, the effect of surface roughness, thin film discontinuity and sample heterogeneity on the optical response of solids is discussed. And the importance of these phenomena in the context of solar energy utilisation is also mentioned briefly.
References
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Book
Principles of Optics
TL;DR: In this paper, the authors discuss various topics about optics, such as geometrical theories, image forming instruments, and optics of metals and crystals, including interference, interferometers, and diffraction.
Principles of Optics
TL;DR: In this article, the authors discuss various topics about optics, such as geometrical theories, image forming instruments, and optics of metals and crystals, including interference, interferometers, and diffraction.
Book
The scattering of electromagnetic waves from rough surfaces
Petr Beckmann,Andre Spizzichino +1 more
TL;DR: The scattering of electromagnetic waves from rough surfaces PDF is available at the online library of the University of Southern California as mentioned in this paper, where a complete collection of electromagnetic wave from rough surface books can be found.