Journal ArticleDOI
Fabricating Microbolometer Array on Unplanar Readout Integrated Circuit
TLDR
In this paper, the integration of an experimental 32 × 32 uncooled IR microbolometer array with an unplanar CMOS Readout Integrated Circuit (ROIC) is presented.Abstract:
In this paper, the integration of an experimental 32 × 32 uncooled IR microbolometer array with an unplanar CMOS Readout Integrated Circuit (ROIC) is presented. A vanadium oxide film fabricated by low temperature reactive ion beam sputtering is utilized as thermal-sensitive material in the bolometric detectors Before the integration, the unplanar ROIC for commercial use is first planarized by bisbenzocyclobutene film, then a electroless nickel-plating on ohmic contact areas is accomplished. Finally the bolometer array is fabricated using a micromachining process, which is completely compatible with CMOS technology. Measurements and calculations for the as-fabricated samples show that the responsivity of 1.4 × 104 V/W and the detectivity of 2.1 × 108cmHz1/2W−1 and a thermal response time of 10ms are obtained at a pulse bias of IV.read more
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Infrared detectors: an overview
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Occupancy Estimation Using Thermal Imaging Sensors and Machine Learning Algorithms
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Proceedings ArticleDOI
On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer
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Journal ArticleDOI
Precision alignment and assembly of a Fourier transform microspectrometer
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References
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Journal ArticleDOI
Infrared detectors: status and trends
TL;DR: In this article, the performance of infrared thermal detectors as compared to photon detectors is investigated and an overview of focal plane array architecture is given with emphasis on monolithic and hybrid structures.
Journal ArticleDOI
Infrared detectors: an overview
TL;DR: In this paper, the authors present progress in infrared (IR) detector technologies during 200 history of their development and the outlook for near-future trends in IR technologies is also presented.
Journal ArticleDOI
Monolithic two-dimensional arrays of micromachined microstructures for infrared applications
TL;DR: In this paper, small micromachined structures have been fabricated that have very small thermal mass (c, about 10/sup -5/ cm/sup 2/) and that are suspended from the underlying silicon substrate by supports of such delicacy that the structures are extremely well thermally isolated from the substrate (thermal conductance to the substrate g of 10 /sup -7/W/K).
Proceedings ArticleDOI
High-performance infrared thermal imaging with monolithic silicon focal planes operating at room temperature
TL;DR: In this paper, the authors describe the nature, operating principles and status of Honeywell's room-temperature infrared imaging focal planes, and present the status of these focal planes.
Journal ArticleDOI
IR microbolometer with self-supporting structure operating at room temperature
TL;DR: In this paper, a new deposition method of VOx thin film was described, which was compatible with Si micromachining and CMOS technology, which is very important for monolithic integration with CMOS readout circuit.
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