Journal ArticleDOI
Grating imaging scanning lithography
Reads0
Chats0
TLDR
In this article, a grating imaging scanning lithography system for the fabrication of large-sized gratings is presented. But this system requires a high-precision two-dimensional (2D) mobile stage for complementary cyclical scanning.Abstract:
We present a grating imaging scanning lithography system for the fabrication of large-sized gratings. In this technology, +(-)1-order diffractive beams are generated by a phase grating and selected by a spatial filter. Meanwhile, a 4f system enables the +(-)1-order diffractive beams to form a grating image with a clear jagged-edge boundary on the substrate. A high-precision two-dimensional (2D) mobile stage is used for complementary cyclical scanning, thereby effectively eliminating image stitching errors. The absence of such errors results in a seamless and uniform large-sized grating. Characterized by a simple structure, high energy use, and good stability, this lithography system is highly relevant to the high-speed and cost-effective production of large-sized gratings.read more
Citations
More filters
Journal ArticleDOI
A survey on the grating based optical position encoder
TL;DR: A comprehensive survey on the optical position encoders, from two aspects of industrial products and academic instruments, is presented and the original work on the relationship between relative orientation and signal distortion has been presented.
Journal ArticleDOI
Focusing properties of phase-only generalized Fibonacci photon sieves
Jie Ke,Junyong Zhang +1 more
TL;DR: In this paper, a phase-only generalized Fibonacci photon sieve (GFiPS) was proposed, which switches the transparent and opaque zones on the basis of the generalized fibonacci sequences.
Journal ArticleDOI
On the difference between single- and double-sided bandpass filtering of spatial frequencies
TL;DR: In this paper, the difference between single-and double-sided bandpass spatial filtering in a 4-f coherent optical image processing system was investigated and it was shown that single-sided filtering can approximate the operation of a first-order derivative, while double-side filtering gives a second-order derivatives.
Journal ArticleDOI
Disaster management using free space optical communication system
TL;DR: A novel method of MISO and MIMO-OFDM which uses both odd and even subcarriers to improve the transmission capacity is proposed and the system performance is evaluated under various atmospheric turbulence conditions.
Journal ArticleDOI
Beam drift error and control technology for scanning beam interference lithography
TL;DR: A mathematical model of step-scanning exposure was established and the effects of the beam drift error on the interference image were analyzed and an exposed beam stable system was designed that can effectively suppress the low-frequency drift of thebeam.