High-Performance Acoustic Wave Sensor Based on PVDF-TrFE Membrane Combing the Piezoelectric and Fabry–Pérot Effects

TLDR: In this article , a dual-channel resonance acoustic sensor based on a polyvinylidene fluoride-co-trifluoroethylene (PVDF-TrFE) piezoelectric (PE) membrane was presented.

Abstract: We present a dual-channel resonance acoustic sensor based on a poly-(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) piezoelectric (PE) membrane which combines the Fabry–Pérot (FP) interference and PE effects. The deformation of circular thin films is indicated by interference and PE effects at the same time, and the noise level was decreased by real-time convolution of the two-way parallel signal. Studies reveal that at the film’s resonance frequency, the minimum detection limits for FP interference and the PE impact on acoustic waves are 2.61 and $15.64 ~\mu $ Pa/Hz1/2, respectively. The result of the convolution shows that the background noise has been reduced by 98.81% in relation to the PE signal and by 96.73% in relation to the FP interference signal, respectively. The signal-to-noise ratio (SNR) of the convolution is several times greater than the other two signals at 2 mPa.