Journal ArticleDOI
High-precision positioning using a self-sensing piezoelectric actuator control with a differential detection method
Hideyuki Ikeda,Takeshi Morita +1 more
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TLDR
In this paper, the authors proposed a self-sensing control method for piezoelectric actuators, which enables high-resolution positioning without an external positioning sensor, but the positioning resolution was insufficient compared to that of traditional external positioning sensors, such as a strain gage sensor.Abstract:
We present a self-sensing control method for piezoelectric actuators, which enables high-resolution positioning without an external positioning sensor. One of the present authors previously proposed a self-sensing piezoelectric actuator control system (Kawamata et al. (2008) [1] and Ishikiriyama and Morita (2010) [2] ). In the previous studies, a linear relationship between piezoelectric displacement and permittivity change was discovered, and this linear relationship was applied for positioning control. To detect permittivity changes, a high frequency voltage signal (permittivity detection voltage), in addition to the driving voltage signal, was applied to the actuator. The permittivity change was monitored as the amplitude of the current at the same frequency as the permittivity detection voltage. From this current amplitude, the permittivity change was easily calculated in real time. However, the positioning resolution was insufficient compared to that of traditional external positioning sensors, such as a strain gage sensor. In this study, we improved the positioning resolution by introducing a differential current measurement using two piezoelectric elements, one on each side of a bimorph actuator. The phase of the detected current signal was taken into consideration using a lock-in amplifier. In other words, the conductivity-related current and the permittivity-related current were measured separately. With these improvements, the permittivity change related to the piezoelectric displacement could be measured precisely, and self-sensing feedback control with a positioning error of less than 0.4 μm over a movement range of 80 μm was demonstrated.read more
Citations
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References
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Journal ArticleDOI
Displacement control of piezoelectric element by feedback of induced charge
TL;DR: In this paper, a displacement control method of a piezoelectric actuator (piezo) is presented. But the method is not suitable for high driving frequency as the piezo is driven with a voltage source which has low output impedance.
Journal ArticleDOI
Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators
TL;DR: A self-sensing method dedicated to free uni- and bimorph piezocantilevers but can also be adapted to other piezoactuator types, which has the ability to keep displacement information for long-term periods and in the reduction in signal noise.
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Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators
TL;DR: A new method of self-sensing both of the displacement and the external applied force at the tip of piezoelectric cantilevers is presented, using the Prandtl-Ishlinskii static approach while an auto regressive and moving average exogenous model is used to minimize the creep influence.
Journal ArticleDOI
Self-Sensing Piezoelectric Actuator using Permittivity Detection
TL;DR: In this paper, a self-sensing control system using permittivity change detection was demonstrated, which is based on the linear relationship between the permittivities and the piezoelectric displacement.
Journal ArticleDOI
Improvement of Self-sensing Piezoelectric Actuator Control Using Permittivity Change Detection
TL;DR: In this paper, a self-sensing control method of piezoelectric actuators was proposed to compensate the hysteresis characteristics by using the linear relationship between the permittivity change and the displacement.