Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction.
TLDR
Experimental results show that the angle correction method was effective in improving the linearity of the eddy current sensors and reducing the influence of manufacturing and installation errors.Abstract:
Scanning mirrors appear to be key components in optoelectronic systems for line-of-sight (LOS) stabilization. For improving the angular accuracy of a scanning mirror based on the eddy current displacement sensor measurement, an angular error-correction method is proposed and demonstrated. A mathematic angular error model with physical parameters was developed, and the cross-validation method was employed to determine the reasonable order of the Maclaurin series used in the error model, which increased the exactitude and robustness of the correction method. The error parameters were identified by accurately fitting the calibrated angular errors with the error model, which showed excellent error prediction performance. Based on the angular calculation model corrected by the error model, the closed-loop control system was established to obtain accurate deflection angles. Experimental results show that within the deflection angle of ±1.5 deg, the angular accuracy was improved from 0.28 deg to less than 1.1 arcsec, and the standard deviation for six measurements was less than 1.2 arcsec, which indicates that the angle correction method was effective in improving the linearity of the eddy current sensors and reducing the influence of manufacturing and installation errors.read more
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Method of rotation angle measurement in machine vision based on calibration pattern with spot array
TL;DR: The experiment results show that the measurement device can measure the rotation angle precisely with a noncontact method and the standard deviation of rotation angle measurement is smaller than 3 arc sec.
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Small angular displacement measurement based on an autocollimator and a common-path compensation principle.
Ke Li,Cuifang Kuang,Xu Liu +2 more
TL;DR: A novel method for small angular displacement measurement based on an autocollimator and a common-path compensation principle by using single CCD detector was proposed and the stability of the system and the measurement resolution were improved.
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5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application
TL;DR: An ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible is presented and a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established.
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High-precision rotation angle measurement method based on monocular vision
Jing Jin,Lingna Zhao,Shengli Xu +2 more
TL;DR: This method has high measurement precision and good stability, therefore it can widely use this method in machinery manufacturing, engineering measurement, aerospace, and the military.
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A two-dimensional laser scanning mirror using motion-decoupling electromagnetic actuators.
TL;DR: A finite element analysis is implemented to calculate magnetic flux in the electromagnetic system and experiments using a prototype with the overall size of 22 mm (W) × 20 mm (D) × 15 mm (H) for the mirror size of 8 mm × 8 mm are conducted.