Journal ArticleDOI
Influence of scanning rate on quality of AFM image: Study of surface statistical metrics
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TLDR
The article explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate.Abstract:
The purpose of this work is to study the dependence of AFM-data reliability on scanning rate. The three-dimensional (3D) surface topography of the samples with different micro-motifs is investigated. The analysis of surface metrics for estimation of artifacts from inappropriate scanning rate is presented. Fractal analysis was done by cube counting method and evaluation of statistical metrics was carrying out on the basis of AFM-data. Combination of quantitate parameters is also presented in graphs for every measurement. The results indicate that the sensitivity to scanning rate growths with fractal dimension of the sample. This approach allows describing the distortion of the images against scanning rate and could be applied for dependences on the other measurement parameters. The article explains the relevance and comparison of fractal and statistical surface parameters for characterization of data distortion caused by inappropriate choice of scanning rate.read more
Citations
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References
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Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction , and Tip Estimation
TL;DR: Treatment of the tip-surface interaction as a simple geometrical exclusion allows calculation of many quantities important for SPM dimensional metrology and Blind reconstruction, previously demonstrated only for simulated noiseless images, is here extended to images with noise or other experimental artifacts.
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Fractal and multifractal analysis of LiF thin film surface
TL;DR: Fractal and multifractal analysis was performed on the surface morphologies of the LiF thin films of thickness 10nm, 20nm, and 40nm, respectively, as mentioned in this paper.
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Correction of the tip convolution effects in the imaging of nanostructures studied through scanning force microscopy
TL;DR: It is demonstrated that for a constant tip radius, the convolution error is increased with the object height, mainly for the narrowest motifs.
Journal ArticleDOI
Comparison of fractal and profilometric methods for surface topography characterization
TL;DR: In this paper, microstructural and roughness characterization of surface of aluminium foils used in lithographic printing process was performed by contact and non-contact profilometric methods and fractal analysis.
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AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates
TL;DR: In this paper, the 3D surface morphology of aluminum nitride (AlN) epilayers on sapphire substrates prepared by magnetron sputtering was studied by combination of atomic force microscopy (AFM) and fractal analysis methods.