Proceedings ArticleDOI
Linear/Angular Displacement Interferometer For Wafer Stage Metrology
Gary E. Sommargren
- Vol. 1088, pp 268-273
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TLDR
In this article, a dual measurement interferometer was developed specifically for wafer stage metrology, which concurrently measures both linear and angular displacement, and was designed to conserve space, minimize stage mass, eliminate heat sources and provide high resolution and slew rate.Abstract:
A dual measurement interferometer has been developed specifically for wafer stage metrology. The interferometer concurrently measures both linear and angular displacement. It is designed to conserve space, minimize stage mass, eliminate heat sources and provide high resolution and slew rate.read more
Citations
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Journal ArticleDOI
Recent advances in displacement measuring interferometry
TL;DR: In this article, the state of the art in high-resolution displacement measuring interferometry is reviewed, and several approaches to improve this situation are described, including multi-wavelength inter-ferometry.
Journal ArticleDOI
A 6-degree-of-freedom measurement system for the accuracy of X-Y stages
Kuang-Chao Fan,Mu-Jung Chen +1 more
TL;DR: In this paper, a precision 6-degree-of-freedom measurement system was developed for simultaneous on-line measurements of six motion errors of an X-Y stage, which employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the XY stage.
Journal ArticleDOI
Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage
TL;DR: In this article, a measuring system for the simultaneous measurement of six-degrees-of-freedom motion errors of a moving stage is presented, which integrates a miniature fiber coupled laser interferometer with specially designed optical paths and quadrant detectors.
Journal ArticleDOI
A linear/angular interferometer capable of measuring large angular motion
Ji-hua Zhang,Chia-Hsiang Menq +1 more
TL;DR: In this paper, a linear and angular interferometric heterodyne system with a retroreflector and a plane-mirror reflector was proposed to measure large angular motion.
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