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Journal ArticleDOI

Long-trace profiler with cyclic optical configuration

Sanjib Chatterjee, +1 more
- 01 Oct 2002 - 
- Vol. 41, Iss: 28, pp 5857-5859
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TLDR
The results of the development of a much simpler optical configuration for the long-trace profiler (LTP) are presented, which employs a cyclic optical configuration to achieve zero optical path difference for the closely spaced, laterally separated laser beams.
Abstract
The results of the development of a much simpler optical configuration for the long-trace profiler (LTP) are presented. The current technique employs a cyclic optical configuration to achieve zero optical path difference for the closely spaced, laterally separated laser beams. The accuracy of measurement is found to remain as good as that in the case of the widely used LTP, although the geometrical alignment problem is simplified significantly.

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Citations
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Journal ArticleDOI

Self-referenced rectangular path cyclic interferometer with polarization phase shifting

TL;DR: The polarization phase shifting technique is used to generate four phase-shifted interferograms, which are utilized to evaluate the phase profile of the phase sample.
Journal ArticleDOI

Sub-nanometre double shearing heterodyne interferometry for profiling large scale planar surfaces

TL;DR: In this paper, a double shearing interferometric method was proposed for profiling large-scale quasi-planar surfaces, such as semiconductor wafers, optical flats and x-ray mirrors.
Journal ArticleDOI

Measurement of the surface profile of a curved optical surface with rotation phase-shifting lateral shear cyclic path optical configuration.

TL;DR: In this article, phase shifts between the laterally sheared emergent beam components of a cyclic path optical configuration are introduced by applying a small change in the angle of incidence of the incident beam due to the small angular rotation of the setup.
Journal ArticleDOI

Simple technique for the generation of white light Young's fringes with a cyclic optical configuration

TL;DR: A new (to the authors' knowledge) technique for the generation of white light Young's type fringes using a cyclic path optical configuration is presented and the effect of the size of an incoherent broadband light source on the fringe visibility is discussed.
Journal ArticleDOI

Measurement of residual wedge angle of a high optical quality transparent parallel plate with a multipass optical configuration

TL;DR: In this article, a new technique of wedge angle measurement of a transparent nearly parallel plate (PP) is presented, where the single pass angular deviation suffered by a pair of mutually parallel, laterally separated pencil beams is enhanced by using a multipass cavity formed with two right-angle prisms.
References
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Journal ArticleDOI

Measurement of x‐ray telescope mirrors using a vertical scanning long trace profiler

TL;DR: In this article, a vertical scanning long trace profiler was used to measure the surface of a polished x-ray telescope mandrel in a vertical configuration and provide a 3D view of the surface figure and slope inaccuracies.
Proceedings ArticleDOI

Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors

TL;DR: The Vertical Scanning Long Trace Profiler (VSLTP) was developed under a SBIR Phase II grant from NASA as discussed by the authors, which is capable of scanning shell mirrors with a diameter as small as 100 mm for a travel distance of 700 mm.
Proceedings ArticleDOI

Surface Topography Measurements Over The 1 Meter To 10 Micrometer Spatial Period Bandwidth

TL;DR: In this article, a long-trace surface profiling instrument (LTP) was developed to measure surface profiles on grazing incidence aspheres and also conventional optical surfaces, which can characterize both figure and finish of an optical surface in the same way that we normally characterize surface finish.
Proceedings ArticleDOI

Mirror materials for synchrotron radiation optics

TL;DR: In this paper, the authors present a general review of materials and several others that can be finished to the required figure and finish levels, generally considered to be < 3 microradians rms and < 5 angstroms rms.
Proceedings ArticleDOI

Metrology laboratory requirements for third-generation synchrotron radiation sources

TL;DR: The history behind the formation of the optical metrology laboratory at Brookhaven National Laboratory and the rationale for its continued existence is reviewed in this article, along with suggestions to those who may be contemplating setting up similar facilities, based on their experiences over the past two decades.
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